Simultaneous electrical and optical study of spoke rotation,
merging and splitting in HiPIMS plasma

J 2017

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA, James BRADLEY et. al.

Basic information

Original name

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma

Authors

KLEIN, Peter (703 Slovakia, belonging to the institution), Francis LOCKWOOD ESTRIN (826 United Kingdom of Great Britain and Northern Ireland), Jaroslav HNILICA (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution) and James BRADLEY (826 United Kingdom of Great Britain and Northern Ireland)

Edition

Journal of Physics D: Applied Physics, Bristol, IOP Publishing, 2017, 0022-3727

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 2.373

RIV identification code

RIV/00216224:14310/17:00094594

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/1361-6463/50/1/015209

UT WoS

000389213100001

Keywords in English

magnetron sputtering; HiPIMS; spokes; spoke model

Abstract

V originále

To gain more information on the temporal and spatial behaviour of self-organized spoke structures in HiPIMS plasmas, a correlation between the broadband optical image of an individual spoke (taken over 200 ns) and the current it delivers to the target has been made for a range of magnetron operating conditions. As a spoke passes over a set of embedded probes in the niobium cathode target, a distinct modulation in the local current density is observed, (typically up to twice the average value), matching very well the radially integrated optical emission intensities (obtained remotely with an ICCD camera). The dual diagnostic system allows the merging and splitting of a set of spokes to be studied as they rotate. It is observed that in the merger of two spokes, the trailing spoke maintains its velocity while the leading spoke either decreases its velocity or increases its azimuthal length. In the spoke splitting process, the total charge collected by an embedded probe is conserved. A simple phenomenological model is developed that relates the spoke mode number m to the spoke dimensions, spoke velocity and gas atom velocity. The results are discussed in the context of the observations of spoke dynamics made by Hecimovic et al (2015 Plasma Sources Sci. Technol. 24 045005).

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GA15-00863S, research and development project

Name: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Czech Science Foundation

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA and James BRADLEY. Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma. Journal of Physics D: Applied Physics. Bristol: IOP Publishing, 2017, vol. 50, No 1, p. nestránkováno, 10 pp. ISSN 0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/50/1/015209.

@article{1366538,
   author = {Klein, Peter and Lockwood Estrin, Francis and Hnilica, Jaroslav and Vašina, Petr and Bradley, James},
   article_location = {Bristol},
   article_number = {1},
   doi = {http://dx.doi.org/10.1088/1361-6463/50/1/015209},
   keywords = {magnetron sputtering; HiPIMS; spokes; spoke model},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of Physics D: Applied Physics},
   title = {Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma},
   volume = {50},
   year = {2017}
}

TY  - JOUR
ID  - 1366538
AU  - Klein, Peter - Lockwood Estrin, Francis - Hnilica, Jaroslav - Vašina, Petr - Bradley, James
PY  - 2017
TI  - Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
JF  - Journal of Physics D: Applied Physics
VL  - 50
IS  - 1
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP Publishing
SN  - 00223727
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spokes
KW  - spoke model
N2  - To gain more information on the temporal and spatial behaviour of self-organized spoke structures in HiPIMS plasmas, a correlation between the broadband optical image of an individual spoke (taken over 200 ns) and the current it delivers to the target has been made for a range of magnetron operating conditions. As a spoke passes over a set of embedded probes in the niobium cathode target, a distinct modulation in the local current density is observed, (typically up to twice the average value), matching very well the radially integrated optical emission intensities (obtained remotely with an ICCD camera). The dual diagnostic system allows the merging and splitting of a set of spokes to be studied as they rotate. It is observed that in the merger of two spokes, the trailing spoke maintains its velocity while the leading spoke either decreases its velocity or increases its azimuthal length. In the spoke splitting process, the total charge collected by an embedded probe is conserved. A simple phenomenological model is developed that relates the spoke mode number m to the spoke dimensions, spoke velocity and gas atom velocity. The results are discussed in the context of the observations of spoke dynamics made by Hecimovic et al (2015 Plasma Sources Sci. Technol. 24 045005).
ER  -

KLEIN, Peter, Francis LOCKWOOD ESTRIN, Jaroslav HNILICA, Petr VAŠINA and James BRADLEY. Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma. \textit{Journal of Physics D: Applied Physics}. Bristol: IOP Publishing, 2017, vol.~50, No~1, p.~nestránkováno, 10 pp. ISSN~0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/50/1/015209.

Detailed Information on Publication Record