Wide-pressure-range coplanar dielectric barrier discharge:
Operational characterisation of a versatile plasma source

J 2017

Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source

ČECH, Jan, Zdeněk BONAVENTURA, Pavel SŤAHEL, Miroslav ZEMÁNEK, Hana DVOŘÁKOVÁ et. al.

Basic information

Original name

Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source

Authors

ČECH, Jan (203 Czech Republic, guarantor, belonging to the institution), Zdeněk BONAVENTURA (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution), Miroslav ZEMÁNEK (203 Czech Republic, belonging to the institution), Hana DVOŘÁKOVÁ (203 Czech Republic, belonging to the institution) and Mirko ČERNÁK (703 Slovakia, belonging to the institution)

Edition

Physics of Plasmas, MELVILLE, AMER INST PHYSICS, 2017, 1070-664X

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.941

RIV identification code

RIV/00216224:14310/17:00094621

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1063/1.4973442

UT WoS

000395395100076

Keywords in English

dielectric barrier discharge; coplanar; wide pressure range; low pressure; paschen; iccd

Abstract

V originále

Many plasma applications could benefit from the versatile plasma source operable at a wide-pressure-range, e.g., from the fraction of Pa to the super-atmospheric conditions. In this paper, the basic characteristics of wide-pressure-range plasma source based on the coplanar dielectric barrier discharge is given. The operational characteristics of this plasma source were measured in nitrogen at pressures ranging from 10^1Pa (resp. 10^-4Pa) to 10^5Pa. Measurements of the plasma geometry, breakdown voltage, and micro-discharges' behaviour revealed three operational regimes of this plasma source: "high pressure," "transitional" and "low-pressure" with vague boundaries at the pressures of approx. 10 kPa and 1 kPa. It was found that the plasma layer of coplanar dielectric barrier discharge could be expanded up to several centimetres to the half-space above the planar dielectric barrier when the gas pressure is reduced below 1 kPa, which provides an outstanding space to tailor the source for the specific applications. The proposed model of an effective gap distance in the Paschen breakdown criterion enabled us to explain the discharge behaviour fitting the experimental breakdown voltage data in the whole studied pressure range. Under the filament-forming conditions, i.e., at the pressure range from approx. 1-100 kPa, the active plasma volume could be varied through the micro-discharges' lateral thickness scaling with the inverse of the square-root of the gas pressure.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GA13-24635S, research and development project

Name: Spektroskopické studium rekombinace povrchového náboje v dielektrických bariérových výbojích

Investor: Czech Science Foundation

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

ČECH, Jan, Zdeněk BONAVENTURA, Pavel SŤAHEL, Miroslav ZEMÁNEK, Hana DVOŘÁKOVÁ and Mirko ČERNÁK. Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source. Physics of Plasmas. MELVILLE: AMER INST PHYSICS, 2017, vol. 24, No 1, p. nestránkováno, 5 pp. ISSN 1070-664X. Available from: https://dx.doi.org/10.1063/1.4973442.

@article{1368714,
   author = {Čech, Jan and Bonaventura, Zdeněk and Sťahel, Pavel and Zemánek, Miroslav and Dvořáková, Hana and Černák, Mirko},
   article_location = {MELVILLE},
   article_number = {1},
   doi = {http://dx.doi.org/10.1063/1.4973442},
   keywords = {dielectric barrier discharge; coplanar; wide pressure range; low pressure; paschen; iccd},
   language = {eng},
   issn = {1070-664X},
   journal = {Physics of Plasmas},
   title = {Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source},
   volume = {24},
   year = {2017}
}

TY  - JOUR
ID  - 1368714
AU  - Čech, Jan - Bonaventura, Zdeněk - Sťahel, Pavel - Zemánek, Miroslav - Dvořáková, Hana - Černák, Mirko
PY  - 2017
TI  - Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source
JF  - Physics of Plasmas
VL  - 24
IS  - 1
SP  - nestránkováno
EP  - nestránkováno
PB  - AMER INST PHYSICS
SN  - 1070664X
KW  - dielectric barrier discharge
KW  - coplanar
KW  - wide pressure range
KW  - low pressure
KW  - paschen
KW  - iccd
N2  - Many plasma applications could benefit from the versatile plasma source operable at a wide-pressure-range, e.g., from the fraction of Pa to the super-atmospheric conditions. In this paper, the basic characteristics of wide-pressure-range plasma source based on the coplanar dielectric barrier discharge is given. The operational characteristics of this plasma source were measured in nitrogen at pressures ranging from 10^1Pa (resp. 10^-4Pa) to 10^5Pa. Measurements of the plasma geometry, breakdown voltage, and micro-discharges' behaviour revealed three operational regimes of this plasma source: "high pressure," "transitional" and "low-pressure" with vague boundaries at the pressures of approx. 10 kPa and 1 kPa. It was found that the plasma layer of coplanar dielectric barrier discharge could be expanded up to several centimetres to the half-space above the planar dielectric barrier when the gas pressure is reduced below 1 kPa, which provides an outstanding space to tailor the source for the specific applications. The proposed model of an effective gap distance in the Paschen breakdown criterion enabled us to explain the discharge behaviour fitting the experimental breakdown voltage data in the whole studied pressure range. Under the filament-forming conditions, i.e., at the pressure range from approx. 1-100 kPa, the active plasma volume could be varied through the micro-discharges' lateral thickness scaling with the inverse of the square-root of the gas pressure.
ER  -

ČECH, Jan, Zdeněk BONAVENTURA, Pavel SŤAHEL, Miroslav ZEMÁNEK, Hana DVOŘÁKOVÁ and Mirko ČERNÁK. Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source. \textit{Physics of Plasmas}. MELVILLE: AMER INST PHYSICS, 2017, vol.~24, No~1, p.~nestránkováno, 5 pp. ISSN~1070-664X. Available from: https://dx.doi.org/10.1063/1.4973442.

Detailed Information on Publication Record