ČECH, Jan, Zdeněk BONAVENTURA, Pavel SŤAHEL, Miroslav ZEMÁNEK, Hana DVOŘÁKOVÁ and Mirko ČERNÁK. Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source. Physics of Plasmas. MELVILLE: AMER INST PHYSICS, 2017, vol. 24, No 1, p. nestránkováno, 5 pp. ISSN 1070-664X. Available from: https://dx.doi.org/10.1063/1.4973442.
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Basic information
Original name Wide-pressure-range coplanar dielectric barrier discharge: Operational characterisation of a versatile plasma source
Authors ČECH, Jan (203 Czech Republic, guarantor, belonging to the institution), Zdeněk BONAVENTURA (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution), Miroslav ZEMÁNEK (203 Czech Republic, belonging to the institution), Hana DVOŘÁKOVÁ (203 Czech Republic, belonging to the institution) and Mirko ČERNÁK (703 Slovakia, belonging to the institution).
Edition Physics of Plasmas, MELVILLE, AMER INST PHYSICS, 2017, 1070-664X.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 1.941
RIV identification code RIV/00216224:14310/17:00094621
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1063/1.4973442
UT WoS 000395395100076
Keywords in English dielectric barrier discharge; coplanar; wide pressure range; low pressure; paschen; iccd
Tags NZ, rivok
Changed by Changed by: Ing. Nicole Zrilić, učo 240776. Changed: 13/4/2018 09:30.
Abstract
Many plasma applications could benefit from the versatile plasma source operable at a wide-pressure-range, e.g., from the fraction of Pa to the super-atmospheric conditions. In this paper, the basic characteristics of wide-pressure-range plasma source based on the coplanar dielectric barrier discharge is given. The operational characteristics of this plasma source were measured in nitrogen at pressures ranging from 10^1Pa (resp. 10^-4Pa) to 10^5Pa. Measurements of the plasma geometry, breakdown voltage, and micro-discharges' behaviour revealed three operational regimes of this plasma source: "high pressure," "transitional" and "low-pressure" with vague boundaries at the pressures of approx. 10 kPa and 1 kPa. It was found that the plasma layer of coplanar dielectric barrier discharge could be expanded up to several centimetres to the half-space above the planar dielectric barrier when the gas pressure is reduced below 1 kPa, which provides an outstanding space to tailor the source for the specific applications. The proposed model of an effective gap distance in the Paschen breakdown criterion enabled us to explain the discharge behaviour fitting the experimental breakdown voltage data in the whole studied pressure range. Under the filament-forming conditions, i.e., at the pressure range from approx. 1-100 kPa, the active plasma volume could be varied through the micro-discharges' lateral thickness scaling with the inverse of the square-root of the gas pressure.
Links
ED2.1.00/03.0086, research and development projectName: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GA13-24635S, research and development projectName: Spektroskopické studium rekombinace povrchového náboje v dielektrických bariérových výbojích
Investor: Czech Science Foundation
LO1411, research and development projectName: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR
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