Materials Pushing the Application Limits of Wire Grid
Polarizers further into the Deep Ultraviolet Spectral Range

J 2016

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

SIEFKE, Thomas, Stefanie KROKER, Kristin PFEIFFER, Oliver PUFFKY, Kay DIETRICH et. al.

Basic information

Original name

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Authors

SIEFKE, Thomas (276 Germany), Stefanie KROKER (276 Germany), Kristin PFEIFFER (276 Germany), Oliver PUFFKY (276 Germany), Kay DIETRICH (276 Germany), Daniel FRANTA (203 Czech Republic, guarantor, belonging to the institution), Ivan OHLÍDAL (203 Czech Republic, belonging to the institution), Adriana SZEGHALMI (276 Germany), Ernst-Bernhard KLEY (276 Germany) and Andreas TÜNNERMANN (276 Germany)

Edition

Advanced Optical Materials, 2016, 2195-1071

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

Germany

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 6.875

RIV identification code

RIV/00216224:14310/16:00093988

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1002/adom.201600250

UT WoS

000392404200016

Keywords in English

Wire Grid Polarizers; Dispersion model; Films; Lithography

Abstract

V originále

Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

SIEFKE, Thomas, Stefanie KROKER, Kristin PFEIFFER, Oliver PUFFKY, Kay DIETRICH, Daniel FRANTA, Ivan OHLÍDAL, Adriana SZEGHALMI, Ernst-Bernhard KLEY and Andreas TÜNNERMANN. Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range (Materiály pro polarizátory z drátěných mřížek posouvající aplikační omezení dále do ultrafialové spektrální oblasti). Advanced Optical Materials. 2016, vol. 4, No 11, p. 1780-1786. ISSN 2195-1071. Available from: https://dx.doi.org/10.1002/adom.201600250.

@article{1376392,
   author = {Siefke, Thomas and Kroker, Stefanie and Pfeiffer, Kristin and Puffky, Oliver and Dietrich, Kay and Franta, Daniel and Ohlídal, Ivan and Szeghalmi, Adriana and Kley, ErnstandBernhard and Tünnermann, Andreas},
   article_number = {11},
   doi = {http://dx.doi.org/10.1002/adom.201600250},
   keywords = {Wire Grid Polarizers; Dispersion model; Films; Lithography},
   language = {eng},
   issn = {2195-1071},
   journal = {Advanced Optical Materials},
   title = {Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range},
   url = {http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract},
   volume = {4},
   year = {2016}
}

TY  - JOUR
ID  - 1376392
AU  - Siefke, Thomas - Kroker, Stefanie - Pfeiffer, Kristin - Puffky, Oliver - Dietrich, Kay - Franta, Daniel - Ohlídal, Ivan - Szeghalmi, Adriana - Kley, Ernst-Bernhard - Tünnermann, Andreas
PY  - 2016
TI  - Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
JF  - Advanced Optical Materials
VL  - 4
IS  - 11
SP  - 1780-1786
EP  - 1780-1786
SN  - 21951071
KW  - Wire Grid Polarizers
KW  - Dispersion model
KW  - Films
KW  - Lithography
UR  - http://onlinelibrary.wiley.com/doi/10.1002/adom.201600250/abstract
N2  - Wire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior material candidates in this spectral range. To demonstrate this, the design, fabrication, and optical characterization of a titanium dioxide WGP are presented. At a wavelength of 193 nm an unprecedented extinction ratio of 384 and a transmittance of 10% is achieved.
ER  -

SIEFKE, Thomas, Stefanie KROKER, Kristin PFEIFFER, Oliver PUFFKY, Kay DIETRICH, Daniel FRANTA, Ivan OHLÍDAL, Adriana SZEGHALMI, Ernst-Bernhard KLEY and Andreas TÜNNERMANN. Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range (Materiály pro polarizátory z drátěných mřížek posouvající aplikační omezení dále do ultrafialové spektrální oblasti). \textit{Advanced Optical Materials}. 2016, vol.~4, No~11, p.~1780-1786. ISSN~2195-1071. Available from: https://dx.doi.org/10.1002/adom.201600250.

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