| DVOŘÁK, Pavel, Maroš TKÁČIK and Jiří BÉM. Probe technique for measurement of plasma potential waveform. Plasma Sources Science and Technology. Bristol: IOP Publishing, 2017, vol. 26, No 5, p. nestránkováno, 8 pp. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/aa6611. |
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@article{1379684,
author = {Dvořák, Pavel and Tkáčik, Maroš and Bém, Jiří},
article_location = {Bristol},
article_number = {5},
doi = {http://dx.doi.org/10.1088/1361-6595/aa6611},
keywords = {plasma potential; probe},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Probe technique for measurement of plasma potential waveform},
volume = {26},
year = {2017}
}
TY - JOUR
ID - 1379684
AU - Dvořák, Pavel - Tkáčik, Maroš - Bém, Jiří
PY - 2017
TI - Probe technique for measurement of plasma potential waveform
JF - Plasma Sources Science and Technology
VL - 26
IS - 5
SP - nestránkováno
EP - nestránkováno
PB - IOP Publishing
SN - 09630252
KW - plasma potential
KW - probe
N2 - A method for measurement of plasma potential waveforms is presented that is based on measurement with a high-impedance probe and on an electric model of the sheath around the probe. The method was verified and compared with methods that were previously used for measurement of the temporal development of plasma potential during a RF period of capacitive discharges. Sensitivity of the method to the values of required input parameters (mean plasma potential value, electron concentration and temperature) was analyzed and it was found that with a lower precision the method can be used even without the knowledge of these input parameters. Finally, plasma potential waveforms were measured in a low-pressure capacitively coupled discharge. In agreement with theoretical models, generation of higher harmonic frequencies of plasma potential and their sensitivity to electron concentration were observed.
ER -
DVOŘÁK, Pavel, Maroš TKÁČIK and Jiří BÉM. Probe technique for measurement of plasma potential waveform. \textit{Plasma Sources Science and Technology}. Bristol: IOP Publishing, 2017, vol.~26, No~5, p.~nestránkováno, 8 pp. ISSN~0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/aa6611.
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