Detailed Information on Publication Record
2017
Probe technique for measurement of plasma potential waveform
DVOŘÁK, Pavel, Maroš TKÁČIK and Jiří BÉMBasic information
Original name
Probe technique for measurement of plasma potential waveform
Name in Czech
Metoda sondového měření průběhu potenciálu plazmatu
Authors
DVOŘÁK, Pavel (203 Czech Republic, guarantor, belonging to the institution), Maroš TKÁČIK (703 Slovakia, belonging to the institution) and Jiří BÉM (203 Czech Republic, belonging to the institution)
Edition
Plasma Sources Science and Technology, Bristol, IOP Publishing, 2017, 0963-0252
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10305 Fluids and plasma physics
Country of publisher
United Kingdom of Great Britain and Northern Ireland
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 3.939
RIV identification code
RIV/00216224:14310/17:00096609
Organization unit
Faculty of Science
UT WoS
000399736700001
Keywords (in Czech)
potenciál plazmatu; sonda
Keywords in English
plasma potential; probe
Změněno: 10/4/2018 22:58, Ing. Nicole Zrilić
V originále
A method for measurement of plasma potential waveforms is presented that is based on measurement with a high-impedance probe and on an electric model of the sheath around the probe. The method was verified and compared with methods that were previously used for measurement of the temporal development of plasma potential during a RF period of capacitive discharges. Sensitivity of the method to the values of required input parameters (mean plasma potential value, electron concentration and temperature) was analyzed and it was found that with a lower precision the method can be used even without the knowledge of these input parameters. Finally, plasma potential waveforms were measured in a low-pressure capacitively coupled discharge. In agreement with theoretical models, generation of higher harmonic frequencies of plasma potential and their sensitivity to electron concentration were observed.
In Czech
Metoda měření potenciálu plazmatu pomocí vysokoimpedanční nekompenzované sondy. Vliv stěnové vrstvy okolo sondy je počítán modelem se skokovou změnou hustoty náboje.
Links
| LO1411, research and development project |
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