Ti atom and Ti ion number density evolution in standard and
multi-pulse HiPIMS

J 2017

Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS

FEKETE, Matej, Jaroslav HNILICA, Catalin VITELARU, Tiberiu MINEA, Petr VAŠINA et. al.

Basic information

Original name

Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS

Authors

FEKETE, Matej (703 Slovakia, belonging to the institution), Jaroslav HNILICA (203 Czech Republic, belonging to the institution), Catalin VITELARU (642 Romania), Tiberiu MINEA (250 France) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution)

Edition

Journal of Physics D: Applied Physics, Bristol, IOP PUBLISHING LTD, 2017, 0022-3727

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 2.373

RIV identification code

RIV/00216224:14310/17:00094893

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/1361-6463/aa7e6d

UT WoS

000415299900001

Keywords in English

magnetron sputtering; HiPIMS; plasma diagnostics; EBF; TD-LAS; m-HiPIMS

Abstract

V originále

In this paper, comparison of standard and multi-pulse high power impulse magnetron sputtering is performed. The effective branching fraction method is used for titanium atom and ion number density determination, showing that the residual titanium atoms and ions from the preceding pulse are crucial for the subsequent pulse initiation and development. It is shown that the discharge current rises faster in the subsequent pulse, but does not reach the same maximum as in the preceding pulse. The time evolution of the titanium atom density shows different behaviour, initial increase is followed by decrease in the preceding pulse and a rather constant evolution during the subsequent pulse. As for the titanium ion number density, it reaches typically lower values in the subsequent pulse, approaching the maximum values from the preceding pulse only at long delays of 1.5 ms. The most significant increase of the total ion flux to the substrate, namely 43% increase with respect to standard high power impulse magnetron sputtering, is observed in the multi-pulse high power impulse magnetron sputtering with the shortest studied delay of 200 us. The residual titanium atoms produced by the preceding pulse are already thermalized at the beginning of the subsequent pulse, thus being available for ionization during the subsequent pulse. The reservoir of these thermalized atoms gets depleted as the delay increases. However, even for the longest studied delay of 1.5 ms the influence of the preceding pulse on the subsequent pulse is still distinct, including the enhancement of the total ion flux to the substrate by 23%.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GAP205/12/0407, research and development project

Name: Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev

Investor: Czech Science Foundation

GA15-00863S, research and development project

Name: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Czech Science Foundation

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

FEKETE, Matej, Jaroslav HNILICA, Catalin VITELARU, Tiberiu MINEA and Petr VAŠINA. Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS. Journal of Physics D: Applied Physics. Bristol: IOP PUBLISHING LTD, 2017, vol. 50, No 36, p. nestránkováno, 12 pp. ISSN 0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/aa7e6d.

@article{1387787,
   author = {Fekete, Matej and Hnilica, Jaroslav and Vitelaru, Catalin and Minea, Tiberiu and Vašina, Petr},
   article_location = {Bristol},
   article_number = {36},
   doi = {http://dx.doi.org/10.1088/1361-6463/aa7e6d},
   keywords = {magnetron sputtering; HiPIMS; plasma diagnostics; EBF; TD-LAS; m-HiPIMS},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of Physics D: Applied Physics},
   title = {Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS},
   url = {http://iopscience.iop.org/article/10.1088/1361-6463/aa7e6d/meta},
   volume = {50},
   year = {2017}
}

TY  - JOUR
ID  - 1387787
AU  - Fekete, Matej - Hnilica, Jaroslav - Vitelaru, Catalin - Minea, Tiberiu - Vašina, Petr
PY  - 2017
TI  - Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
JF  - Journal of Physics D: Applied Physics
VL  - 50
IS  - 36
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP PUBLISHING LTD
SN  - 00223727
KW  - magnetron sputtering
KW  - HiPIMS
KW  - plasma diagnostics
KW  - EBF
KW  - TD-LAS
KW  - m-HiPIMS
UR  - http://iopscience.iop.org/article/10.1088/1361-6463/aa7e6d/meta
L2  - http://iopscience.iop.org/article/10.1088/1361-6463/aa7e6d/meta
N2  - In this paper, comparison of standard and multi-pulse high power impulse magnetron sputtering is performed. The effective branching fraction method is used for titanium atom and ion number density determination, showing that the residual titanium atoms and ions from the preceding pulse are crucial for the subsequent pulse initiation and development. It is shown that the discharge current rises faster in the subsequent pulse, but does not reach the same maximum as in the preceding pulse. The time evolution of the titanium atom density shows different behaviour, initial increase is followed by decrease in the preceding pulse and a rather constant evolution during the subsequent pulse. As for the titanium ion number density, it reaches typically lower values in the subsequent pulse, approaching the maximum values from the preceding pulse only at long delays of 1.5 ms. The most significant increase of the total ion flux to the substrate, namely 43% increase with respect to standard high power impulse magnetron sputtering, is observed in the multi-pulse high power impulse magnetron sputtering with the shortest studied delay of 200 us. The residual titanium atoms produced by the preceding pulse are already thermalized at the beginning of the subsequent pulse, thus being available for ionization during the subsequent pulse. The reservoir of these thermalized atoms gets depleted as the delay increases. However, even for the longest studied delay of 1.5 ms the influence of the preceding pulse on the subsequent pulse is still distinct, including the enhancement of the total ion flux to the substrate by 23%.
ER  -

FEKETE, Matej, Jaroslav HNILICA, Catalin VITELARU, Tiberiu MINEA and Petr VAŠINA. Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS. \textit{Journal of Physics D: Applied Physics}. Bristol: IOP PUBLISHING LTD, 2017, vol.~50, No~36, p.~nestránkováno, 12 pp. ISSN~0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/aa7e6d.

Detailed Information on Publication Record