J 2017

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

OBRUSNÍK, Adam, Petr JELÍNEK and Lenka ZAJÍČKOVÁ

Basic information

Original name

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Authors

OBRUSNÍK, Adam (203 Czech Republic, belonging to the institution), Petr JELÍNEK (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor, belonging to the institution)

Edition

SURFACE & COATINGS TECHNOLOGY, LAUSANNE, ELSEVIER SCIENCE SA, 2017, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 2.906

RIV identification code

RIV/00216224:14740/17:00097537

Organization unit

Central European Institute of Technology

UT WoS

000397696400022

Keywords in English

Plasma polymerization; Atmospheric pressure; Dielectric barrier discharge; Deposition model; Gas flow model

Tags

Tags

International impact, Reviewed
Změněno: 20/3/2018 21:33, doc. Mgr. Lenka Zajíčková, Ph.D.

Abstract

V originále

We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.

Links

LQ1601, research and development project
Name: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR