OBRUSNÍK, Adam, Petr JELÍNEK and Lenka ZAJÍČKOVÁ. Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge. SURFACE & COATINGS TECHNOLOGY. LAUSANNE: ELSEVIER SCIENCE SA, 2017, vol. 314, MAR, p. 139-147. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2016.10.068.
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Basic information
Original name Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge
Authors OBRUSNÍK, Adam (203 Czech Republic, belonging to the institution), Petr JELÍNEK (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor, belonging to the institution).
Edition SURFACE & COATINGS TECHNOLOGY, LAUSANNE, ELSEVIER SCIENCE SA, 2017, 0257-8972.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher Switzerland
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 2.906
RIV identification code RIV/00216224:14740/17:00097537
Organization unit Central European Institute of Technology
Doi http://dx.doi.org/10.1016/j.surfcoat.2016.10.068
UT WoS 000397696400022
Keywords in English Plasma polymerization; Atmospheric pressure; Dielectric barrier discharge; Deposition model; Gas flow model
Tags rivok
Tags International impact, Reviewed
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 20/3/2018 21:33.
Abstract
We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.
Links
LQ1601, research and development projectName: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR
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