KLENOVSKÝ, Petr, Jaroslav ZŮDA, Petr KLAPETEK and Josef HUMLÍČEK. Ellipsometry of surface layers on a 1-kg sphere from natural silicon. Applied Surface Science. AMSTERDAM: ELSEVIER SCIENCE BV, 2017, vol. 421, January, p. 542-546. ISSN 0169-4332. doi:10.1016/j.apsusc.2016.08.135.
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Basic information
Original name Ellipsometry of surface layers on a 1-kg sphere from natural silicon
Authors KLENOVSKÝ, Petr (203 Czech Republic, belonging to the institution), Jaroslav ZŮDA (203 Czech Republic), Petr KLAPETEK (203 Czech Republic, belonging to the institution) and Josef HUMLÍČEK (203 Czech Republic, guarantor, belonging to the institution).
Edition Applied Surface Science, AMSTERDAM, ELSEVIER SCIENCE BV, 2017, 0169-4332.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher Netherlands
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 4.439
RIV identification code RIV/00216224:14310/17:00097975
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1016/j.apsusc.2016.08.135
UT WoS 000408756700043
Keywords in English Silicon; Surface layers; Ellipsometry; 1-kg mass standard
Tags NZ, rivok
Tags International impact, Reviewed
Changed by Changed by: Ing. Nicole Zrilić, učo 240776. Changed: 3/4/2018 14:21.
Abstract
We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved.
Abstract (in Czech)
Studovali jsme povrchové vrstvy na monokrystalické kouli z n-typu zonálního křemíku ( 2400-2990 Ohm.cm) s průměrem 93.6004 mm. Elipsometrická spektra ve viditelné a ultrafialové oblasti dokumentují přítomnost tenkých vrstev amorfního Si a oxidu křemíku, Připravili jsme rovněž sérii plochých vzorků Si, leštěných pomocí zrn v rozsahu 1-6 mikronů; tyto vzorky byly zkoumány elipsometrickou technikou ve střední infračervené oblasti, včetně oboru poláírních vibrací vazeb Si-O. Modely povrchu koule byly testovány pomocí měření AFM.
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LQ1601, research and development projectName: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR, National Feasibility Programme II
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