KLENOVSKÝ, Petr, Jaroslav ZŮDA, Petr KLAPETEK and Josef HUMLÍČEK. Ellipsometry of surface layers on a 1-kg sphere from natural silicon. Applied Surface Science. AMSTERDAM: ELSEVIER SCIENCE BV, 2017, vol. 421, January, p. 542-546. ISSN 0169-4332. Available from: https://dx.doi.org/10.1016/j.apsusc.2016.08.135. |
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@article{1393035, author = {Klenovský, Petr and Zůda, Jaroslav and Klapetek, Petr and Humlíček, Josef}, article_location = {AMSTERDAM}, article_number = {January}, doi = {http://dx.doi.org/10.1016/j.apsusc.2016.08.135}, keywords = {Silicon; Surface layers; Ellipsometry; 1-kg mass standard}, language = {eng}, issn = {0169-4332}, journal = {Applied Surface Science}, title = {Ellipsometry of surface layers on a 1-kg sphere from natural silicon}, volume = {421}, year = {2017} }
TY - JOUR ID - 1393035 AU - Klenovský, Petr - Zůda, Jaroslav - Klapetek, Petr - Humlíček, Josef PY - 2017 TI - Ellipsometry of surface layers on a 1-kg sphere from natural silicon JF - Applied Surface Science VL - 421 IS - January SP - 542-546 EP - 542-546 PB - ELSEVIER SCIENCE BV SN - 01694332 KW - Silicon KW - Surface layers KW - Ellipsometry KW - 1-kg mass standard N2 - We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved. ER -
KLENOVSKÝ, Petr, Jaroslav ZŮDA, Petr KLAPETEK and Josef HUMLÍČEK. Ellipsometry of surface layers on a 1-kg sphere from natural silicon. \textit{Applied Surface Science}. AMSTERDAM: ELSEVIER SCIENCE BV, 2017, vol.~421, January, p.~542-546. ISSN~0169-4332. Available from: https://dx.doi.org/10.1016/j.apsusc.2016.08.135.
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