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@article{1393035,
author = {Klenovský, Petr and Zůda, Jaroslav and Klapetek, Petr and Humlíček, Josef},
article_location = {AMSTERDAM},
article_number = {January},
doi = {http://dx.doi.org/10.1016/j.apsusc.2016.08.135},
keywords = {Silicon; Surface layers; Ellipsometry; 1-kg mass standard},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Ellipsometry of surface layers on a 1-kg sphere from natural silicon},
volume = {421},
year = {2017}
}
TY - JOUR
ID - 1393035
AU - Klenovský, Petr - Zůda, Jaroslav - Klapetek, Petr - Humlíček, Josef
PY - 2017
TI - Ellipsometry of surface layers on a 1-kg sphere from natural silicon
JF - Applied Surface Science
VL - 421
IS - January
SP - 542-546
EP - 542-546
PB - ELSEVIER SCIENCE BV
SN - 01694332
KW - Silicon
KW - Surface layers
KW - Ellipsometry
KW - 1-kg mass standard
N2 - We have investigated surface layers on a monocrystalline float-zone, n-type ( 2400-2990 Ohm.cm) sphere with the diameter of 93.6004 mm. Ellipsometric spectra in the visible-ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1-6 mu m grits; the overlayers were examined by mid-infrared ellipsometry, including the range of polar vibrations of the Si O bonds. AFM measurements on the sphere were used to test the models of its surface. (C) 2016 Elsevier B.V. All rights reserved.
ER -
KLENOVSKÝ, Petr, Jaroslav ZŮDA, Petr KLAPETEK and Josef HUMLÍČEK. Ellipsometry of surface layers on a 1-kg sphere from natural silicon. \textit{Applied Surface Science}. AMSTERDAM: ELSEVIER SCIENCE BV, vol.~421, January, p.~542-546. ISSN~0169-4332. doi:10.1016/j.apsusc.2016.08.135. 2017.
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