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@proceedings{1398316,
author = {Hnilica, Jaroslav and Šlapanská, Marta and Klein, Peter and Fekete, Matej and Vašina, Petr},
booktitle = {Sixteenth International Conference on Reactive Sputter Deposition 2017},
keywords = {HiPIMS; spokes; titanium},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Spokes occurrence in HiPIMS discharge at different magnetic field strengths},
year = {2017}
}
TY - CONF
ID - 1398316
AU - Hnilica, Jaroslav - Šlapanská, Marta - Klein, Peter - Fekete, Matej - Vašina, Petr
PY - 2017
TI - Spokes occurrence in HiPIMS discharge at different magnetic field strengths
SN - 9788026107545
KW - HiPIMS
KW - spokes
KW - titanium
N2 - The effect of magnetic field strength on spoke behavior was studied by high-speed camera imaging and optical emission spectroscopy (OES) in HiPIMS discharge using 3-inch titanium target. The spoke shape, number of spokes and spoke rotation velocity were observed by employed camera. The camera enabled us to record two successive images in the same pulse with time delay of 3µs between them. The time-resolved measurements of chosen Ti atom, Ti ion, Ar atom and Ar ion lines were made. The experimental conditions covered discharge current up to 350 A, pressure range of 0.15-5 Pa and magnetic fields strength of 37, 72 and 91 mT.
ER -
HNILICA, Jaroslav, Marta ŠLAPANSKÁ, Peter KLEIN, Matej FEKETE a Petr VAŠINA. Spokes occurrence in HiPIMS discharge at different magnetic field strengths. In \textit{Sixteenth International Conference on Reactive Sputter Deposition 2017}. 2017. ISBN~978-80-261-0754-5.
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