Detailed Information on Publication Record
2017
Transition from spokes into a homogeneous plasma in HiPIMS discharge
ŠLAPANSKÁ, Marta, Ante HECIMOVIC, Wolfgang BREILMANN, Jaroslav HNILICA, Petr VAŠINA et. al.Basic information
Original name
Transition from spokes into a homogeneous plasma in HiPIMS discharge
Authors
ŠLAPANSKÁ, Marta (203 Czech Republic, belonging to the institution), Ante HECIMOVIC (191 Croatia), Wolfgang BREILMANN (276 Germany), Jaroslav HNILICA (203 Czech Republic, guarantor, belonging to the institution), Petr VAŠINA (203 Czech Republic, belonging to the institution) and Achim VON KEUDELL (276 Germany)
Edition
Sixteenth International Conference on Reactive Sputter Deposition 2017, 2017
Other information
Language
English
Type of outcome
Konferenční abstrakt
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/17:00095243
Organization unit
Faculty of Science
ISBN
978-80-261-0754-5
Keywords in English
HiPIMS; spokes; chromium; flat probe; optical emission spectroscopy; mass spectrometry
Tags
International impact
Změněno: 5/1/2018 14:11, Mgr. Marta Šlapanská, Ph.D.
Abstract
V originále
The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES).
Links
| ED2.1.00/03.0086, research and development project |
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| GA15-00863S, research and development project |
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| LO1411, research and development project |
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