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@proceedings{1398866,
author = {Fekete, Matej and Bernátová, Katarína and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {Sixteenth International Conference on Reactive Sputter Deposition},
keywords = {R-HiPIMS; OES; titanium},
language = {eng},
isbn = {978-80-261-0754-5},
title = {Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape},
year = {2017}
}
TY - CONF
ID - 1398866
AU - Fekete, Matej - Bernátová, Katarína - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2017
TI - Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape
SN - 9788026107545
KW - R-HiPIMS
KW - OES
KW - titanium
N2 - Likewise as the reactive dc or pulsed-dc sputtering, the R-HiPIMS undergoes hysteresis behaviour, however the hysteresis may be minimised or even suppressed by optimizing the R-HiPIMS process parameters. The exact mechanism behind the hysteresis suppression is still unknown and therefore this issue is yet highly disputed in the scientific community. In this paper, we report the evolution of the sputtered Ti atom and ion ground state densities in R-HiPIMS for both nitrogen and oxygen gasses.
ER -
FEKETE, Matej, Katarína BERNÁTOVÁ, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape. In \textit{Sixteenth International Conference on Reactive Sputter Deposition}. ISBN~978-80-261-0754-5. 2017.
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