Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

FALUB, Claudiu Valentin, Rachid HIDA, Mojmír MEDUŇA, Josef ZWECK, Jean-Philippe MICHEL, Henri SIBUET, Daniel SCHNEIDER, Martin BLESS, Jan H. RICHTER and Hartmut ROHRMANN. Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications. IEEE TRANSACTIONS ON MAGNETICS. PISCATAWAY: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, vol. 53, No 11, p. 2002906-2002911. ISSN 0018-9464. Available from: https://dx.doi.org/10.1109/TMAG.2017.2703175.

Basic information

• Original name: Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications
• Name in Czech: Strukturní a feromagnetické vlastnosti naprašovaných měkkých magnetických multivrstev FeCoB/AlN pro GHz aplikace
• Authors: FALUB, Claudiu Valentin (642 Romania), Rachid HIDA (756 Switzerland), Mojmír MEDUŇA (203 Czech Republic, guarantor, belonging to the institution), Josef ZWECK (756 Switzerland), Jean-Philippe MICHEL (756 Switzerland), Henri SIBUET (756 Switzerland), Daniel SCHNEIDER (756 Switzerland), Martin BLESS (756 Switzerland), Jan H. RICHTER (756 Switzerland) and Hartmut ROHRMANN (756 Switzerland).
• Edition: IEEE TRANSACTIONS ON MAGNETICS, PISCATAWAY, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2017, 0018-9464.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 1.467
• RIV identification code: RIV/00216224:14310/17:00099306
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1109/TMAG.2017.2703175
• UT WoS: 000413981300039
• Keywords (in Czech): FeCoB; permeabilita vysoké high-frekvence; magnetické multivrstvy; magnetronové naprašování; měkké magnetické materiály
• Keywords in English: FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials
• Tags: NZ, rivok
• Tags: International impact, Reviewed

Abstract

In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.

Abstract (in Czech)

V tomto článku jsme studovali strukturní a magnetické vlastnosti amorfních tenkovrstvých vrstev FeCoB/AlN s rovinnou jednoosovou magnetickou anizotropií založenou na slitině Fe-28% Co-20% B, vypěstované na 8" Si/200 nm-termo-SiO2 deskách v průmyslovém, vysoce výkonném magnetronovém rozprašovacím systému.

Links

• ED1.1.00/02.0068, research and development project: Name: CEITEC - central european institute of technology
• LM2011020, research and development project: Name: CEITEC ? open access

Investor: Ministry of Education, Youth and Sports of the CR

• LQ1601, research and development project: Name: CEITEC 2020 (Acronym: CEITEC2020)

Investor: Ministry of Education, Youth and Sports of the CR