Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN
system: Epitaxial self-stabilization by element
deficiency/excess

J 2017

Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess

ZÁLEŠÁK, Jakub, David HOLEC, I. MATKO, M. PETRENEC, B. SARTORY et. al.

Basic information

Original name

Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess

Authors

ZÁLEŠÁK, Jakub (203 Czech Republic), David HOLEC (203 Czech Republic), I. MATKO (703 Slovakia), M. PETRENEC, B. SARTORY, Nikola KOUTNÁ (203 Czech Republic, belonging to the institution), R. DANIEL, R. PITONAK and J. KECKES

Edition

ACTA MATERIALIA, Oxford, PERGAMON-ELSEVIER SCIENCE LTD, 2017, 1359-6454

Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

is not subject to a state or trade secret

References:

URL

Impact factor

Impact factor: 6.036

RIV identification code

RIV/00216224:14310/17:00108790

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.actamat.2017.04.009

UT WoS

000402343400036

Keywords in English

Thin film; Self-assembly; Nanolamella; Chemical vapour deposition; TEM

Abstract

V originále

Synthesis of self-assembled thin films with multi -layered microstructures and outstanding functional properties represents a challenging task. In this work, detailed microstructural and chemical analyses of a self -assembled similar to 3.8 tm thick cubic (c) (AlxTi1-x)(y)N1-y film grown by low pressure chemical vapour deposition on a Al2O3(0001) substrate is discussed. The film with an overall x fraction of similar to 0.8 consists of alternating non-stoichiometric cubic Al-rich and Ti-rich nanolamellae with thicknesses of similar to 11 and similar to 1.5 nm. X-ray diffraction, electron microscopy and electron energy loss spectroscopy indicate that the nanolamellae coherency is primarily a result of an N deficiency in Ti-rich nanolamellae and an N excess in nanolamellae, which induce a decrease and an increase in nanolamellae lattice parameters, compared to the lattice parameters of stoichiometric rock-salt c-TiN and c-AIN, respectively. Therefore the self-assembly allows a formation of c-(AlxTi1-x)(y)N1-y nanolamellae with Al atomic fraction x of 0.9 -1.0, which are stabilized by neighbouring Ti-rich nanolamellae as a result of cube-on-cube epitaxy. The effect of the lattice parameter self-adjustment in the coherent nanolamellae by element deficiency and excess is verified by ab initio calculations. The compositional and morphological matches of the nano lamellae interfaces at the grain boundaries, the terraced growth with tetrahedral surface morphology and unzipped facets as well as the uniform nanolamellae thickness across the film depth indicate that the nanolamellae are formed as a result of kinetically-controlled oscillating reactions during the film growth. The understanding of this fascinating self -assembled nanolamellar microstructure containing a metastable c-AlNy, which does not exist in a bulk form at ambient conditions, represents a milestone in thin film technology. (C) 2017 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Citovat

ZÁLEŠÁK, Jakub, David HOLEC, I. MATKO, M. PETRENEC, B. SARTORY, Nikola KOUTNÁ, R. DANIEL, R. PITONAK and J. KECKES. Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess. ACTA MATERIALIA. Oxford: PERGAMON-ELSEVIER SCIENCE LTD, 2017, vol. 131, JUN, p. 391-399. ISSN 1359-6454. Available from: https://dx.doi.org/10.1016/j.actamat.2017.04.009.

@article{1405115,
   author = {Zálešák, Jakub and Holec, David and Matko, I. and Petrenec, M. and Sartory, B. and Koutná, Nikola and Daniel, R. and Pitonak, R. and Keckes, J.},
   article_location = {Oxford},
   article_number = {JUN},
   doi = {http://dx.doi.org/10.1016/j.actamat.2017.04.009},
   keywords = {Thin film; Self-assembly; Nanolamella; Chemical vapour deposition; TEM},
   language = {eng},
   issn = {1359-6454},
   journal = {ACTA MATERIALIA},
   title = {Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess},
   url = {https://www.sciencedirect.com/science/article/pii/S1359645417302914},
   volume = {131},
   year = {2017}
}

TY  - JOUR
ID  - 1405115
AU  - Zálešák, Jakub - Holec, David - Matko, I. - Petrenec, M. - Sartory, B. - Koutná, Nikola - Daniel, R. - Pitonak, R. - Keckes, J.
PY  - 2017
TI  - Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess
JF  - ACTA MATERIALIA
VL  - 131
IS  - JUN
SP  - 391-399
EP  - 391-399
PB  - PERGAMON-ELSEVIER SCIENCE LTD
SN  - 13596454
KW  - Thin film
KW  - Self-assembly
KW  - Nanolamella
KW  - Chemical vapour deposition
KW  - TEM
UR  - https://www.sciencedirect.com/science/article/pii/S1359645417302914
L2  - https://www.sciencedirect.com/science/article/pii/S1359645417302914
N2  - Synthesis of self-assembled thin films with multi -layered microstructures and outstanding functional properties represents a challenging task. In this work, detailed microstructural and chemical analyses of a self -assembled similar to 3.8 tm thick cubic (c) (AlxTi1-x)(y)N1-y film grown by low pressure chemical vapour deposition on a Al2O3(0001) substrate is discussed. The film with an overall x fraction of similar to 0.8 consists of alternating non-stoichiometric cubic Al-rich and Ti-rich nanolamellae with thicknesses of similar to 11 and similar to 1.5 nm. X-ray diffraction, electron microscopy and electron energy loss spectroscopy indicate that the nanolamellae coherency is primarily a result of an N deficiency in Ti-rich nanolamellae and an N excess in nanolamellae, which induce a decrease and an increase in nanolamellae lattice parameters, compared to the lattice parameters of stoichiometric rock-salt c-TiN and c-AIN, respectively. Therefore the self-assembly allows a formation of c-(AlxTi1-x)(y)N1-y nanolamellae with Al atomic fraction x of 0.9 -1.0, which are stabilized by neighbouring Ti-rich nanolamellae as a result of cube-on-cube epitaxy. The effect of the lattice parameter self-adjustment in the coherent nanolamellae by element deficiency and excess is verified by ab initio calculations. The compositional and morphological matches of the nano lamellae interfaces at the grain boundaries, the terraced growth with tetrahedral surface morphology and unzipped facets as well as the uniform nanolamellae thickness across the film depth indicate that the nanolamellae are formed as a result of kinetically-controlled oscillating reactions during the film growth. The understanding of this fascinating self -assembled nanolamellar microstructure containing a metastable c-AlNy, which does not exist in a bulk form at ambient conditions, represents a milestone in thin film technology. (C) 2017 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
ER  -

ZÁLEŠÁK, Jakub, David HOLEC, I. MATKO, M. PETRENEC, B. SARTORY, Nikola KOUTNÁ, R. DANIEL, R. PITONAK and J. KECKES. Peculiarity of self-assembled cubic nanolamellae in the TiN/AlN system: Epitaxial self-stabilization by element deficiency/excess. \textit{ACTA MATERIALIA}. Oxford: PERGAMON-ELSEVIER SCIENCE LTD, 2017, vol.~131, JUN, p.~391-399. ISSN~1359-6454. Available from: https://dx.doi.org/10.1016/j.actamat.2017.04.009.

Detailed Information on Publication Record