On the effect of the substrate to target position on the
properties of titanium carbide/carbon coatings

J 2017

On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings

DANIEL, Josef, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ et. al.

Basic information

Original name

On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings

Authors

DANIEL, Josef (203 Czech Republic, belonging to the institution), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Lukáš ZÁBRANSKÝ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Monika STUPAVSKÁ (703 Slovakia, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution)

Edition

Surface & coatings technology, LAUSANNE, SWITZERLAND, Elsevier Science, 2017, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 2.906

RIV identification code

RIV/00216224:14310/17:00095576

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2017.06.076

UT WoS

000413376900051

Keywords in English

hybrid PVD-PECVD; TiC; ion flux; microstructure; mechanical properties

Abstract

V originále

Titanium carbide/carbon coatings were deposited by hybrid PVD-PECVD process of titanium sputtering in an atmosphere containing acetylene. Samples were placed above the titanium target centre and above the target racetrack in the same vertical distance to the target to examine the effect of the relative substrate to target position on the properties of the deposited coatings. The different positions of the samples led to significantly different levels of the energy influx onto the growing coating. These differing conditions at the substrate led to altering of the coating's chemical as well as phase composition. Also, the grain size, lattice parameter and the mean grain separation were affected by the energy flux change. Coatings deposited above the racetrack with carbon content less than60% exhibited smaller grains, higher amount of the a-C phase and higher mean grain separation. This microstructure refinement yielded 20–30% higher hardness of the coatings deposited above the target racetrack than corresponding coatings deposited above the target centre. Thus, the sample positioning in the chamber proved to be an important parameter for resulting properties of the deposited coatings.

Links

GA15-17875S, research and development project

Name: Lokální mikrostrukturní změny vyvolané statickou a dynamickou indentací nanostrukturovaných a nanolaminovaných povlaků

Investor: Czech Science Foundation

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

DANIEL, Josef, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ and Petr VAŠINA. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings. Surface & coatings technology. LAUSANNE, SWITZERLAND: Elsevier Science, 2017, vol. 328, November, p. 462-468. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2017.06.076.

@article{1411270,
   author = {Daniel, Josef and Souček, Pavel and Zábranský, Lukáš and Buršíková, Vilma and Stupavská, Monika and Vašina, Petr},
   article_location = {LAUSANNE, SWITZERLAND},
   article_number = {November},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2017.06.076},
   keywords = {hybrid PVD-PECVD; TiC; ion flux; microstructure; mechanical properties},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   title = {On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings},
   volume = {328},
   year = {2017}
}

TY  - JOUR
ID  - 1411270
AU  - Daniel, Josef - Souček, Pavel - Zábranský, Lukáš - Buršíková, Vilma - Stupavská, Monika - Vašina, Petr
PY  - 2017
TI  - On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings
JF  - Surface & coatings technology
VL  - 328
IS  - November
SP  - 462-468
EP  - 462-468
PB  - Elsevier Science
SN  - 02578972
KW  - hybrid PVD-PECVD
KW  - TiC
KW  - ion flux
KW  - microstructure
KW  - mechanical properties
N2  - Titanium carbide/carbon coatings were deposited by hybrid PVD-PECVD process of titanium sputtering in an atmosphere containing acetylene. Samples were placed above the titanium target centre and above the target racetrack in the same vertical distance to the target to examine the effect of the relative substrate to target position on the properties of the deposited coatings. The different positions of the samples led to significantly different levels of the energy influx onto the growing coating. These differing conditions at the substrate led to altering of the coating's chemical as well as phase composition. Also, the grain size, lattice parameter and the mean grain separation were affected by the energy flux change. Coatings deposited above the racetrack with carbon content less than60% exhibited smaller grains, higher amount of the a-C phase and higher mean grain separation. This microstructure refinement yielded 20–30% higher hardness of the coatings deposited above the target racetrack than corresponding coatings deposited above the target centre. Thus, the sample positioning in the chamber proved to be an important parameter for resulting properties of the deposited coatings.
ER  -

DANIEL, Josef, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ and Petr VAŠINA. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings. \textit{Surface \&{} coatings technology}. LAUSANNE, SWITZERLAND: Elsevier Science, 2017, vol.~328, November, p.~462-468. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2017.06.076.

Detailed Information on Publication Record