| DANIEL, Josef, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ and Petr VAŠINA. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings. Surface & coatings technology. LAUSANNE, SWITZERLAND: Elsevier Science, 2017, vol. 328, November, p. 462-468. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2017.06.076. |
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@article{1411270,
author = {Daniel, Josef and Souček, Pavel and Zábranský, Lukáš and Buršíková, Vilma and Stupavská, Monika and Vašina, Petr},
article_location = {LAUSANNE, SWITZERLAND},
article_number = {November},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2017.06.076},
keywords = {hybrid PVD-PECVD; TiC; ion flux; microstructure; mechanical properties},
language = {eng},
issn = {0257-8972},
journal = {Surface & coatings technology},
title = {On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings},
volume = {328},
year = {2017}
}
TY - JOUR
ID - 1411270
AU - Daniel, Josef - Souček, Pavel - Zábranský, Lukáš - Buršíková, Vilma - Stupavská, Monika - Vašina, Petr
PY - 2017
TI - On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings
JF - Surface & coatings technology
VL - 328
IS - November
SP - 462-468
EP - 462-468
PB - Elsevier Science
SN - 02578972
KW - hybrid PVD-PECVD
KW - TiC
KW - ion flux
KW - microstructure
KW - mechanical properties
N2 - Titanium carbide/carbon coatings were deposited by hybrid PVD-PECVD process of titanium sputtering in an atmosphere containing acetylene. Samples were placed above the titanium target centre and above the target racetrack in the same vertical distance to the target to examine the effect of the relative substrate to target position on the properties of the deposited coatings. The different positions of the samples led to significantly different levels of the energy influx onto the growing coating. These differing conditions at the substrate led to altering of the coating's chemical as well as phase composition. Also, the grain size, lattice parameter and the mean grain separation were affected by the energy flux change. Coatings deposited above the racetrack with carbon content less than60% exhibited smaller grains, higher amount of the a-C phase and higher mean grain separation. This microstructure refinement yielded 20–30% higher hardness of the coatings deposited above the target racetrack than corresponding coatings deposited above the target centre. Thus, the sample positioning in the chamber proved to be an important parameter for resulting properties of the deposited coatings.
ER -
DANIEL, Josef, Pavel SOUČEK, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ and Petr VAŠINA. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings. \textit{Surface \&{} coatings technology}. LAUSANNE, SWITZERLAND: Elsevier Science, 2017, vol.~328, November, p.~462-468. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2017.06.076.
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