Effect of magnetic field on spoke behaviour in HiPIMS plasma

J 2018

Effect of magnetic field on spoke behaviour in HiPIMS plasma

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE, Petr VAŠINA et. al.

Basic information

Original name

Effect of magnetic field on spoke behaviour in HiPIMS plasma

Authors

HNILICA, Jaroslav (203 Czech Republic, guarantor, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution), Marta ŠLAPANSKÁ (203 Czech Republic, belonging to the institution), Matej FEKETE (703 Slovakia, belonging to the institution) and Petr VAŠINA (203 Czech Republic, belonging to the institution)

Edition

Journal of physics D: Applied physics, Bristol, England, IOP Publishing Ltd. 2018, 0022-3727

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 2.829

RIV identification code

RIV/00216224:14310/18:00100935

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/1361-6463/aaa7d3

UT WoS

000424898300002

Keywords in English

magnetron sputtering; HiPIMS; spokes; plasma diagnostics

Abstract

V originále

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

Links

GA15-00863S, research and development project

Name: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Czech Science Foundation

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE and Petr VAŠINA. Effect of magnetic field on spoke behaviour in HiPIMS plasma. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., 2018, vol. 51, No 9, p. nestránkováno, 8 pp. ISSN 0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/aaa7d3.

@article{1417221,
   author = {Hnilica, Jaroslav and Klein, Peter and Šlapanská, Marta and Fekete, Matej and Vašina, Petr},
   article_location = {Bristol, England},
   article_number = {9},
   doi = {http://dx.doi.org/10.1088/1361-6463/aaa7d3},
   keywords = {magnetron sputtering; HiPIMS; spokes; plasma diagnostics},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of physics D: Applied physics},
   title = {Effect of magnetic field on spoke behaviour in HiPIMS plasma},
   url = {http://dx.doi.org/10.1088/1361-6463/aaa7d3},
   volume = {51},
   year = {2018}
}

TY  - JOUR
ID  - 1417221
AU  - Hnilica, Jaroslav - Klein, Peter - Šlapanská, Marta - Fekete, Matej - Vašina, Petr
PY  - 2018
TI  - Effect of magnetic field on spoke behaviour in HiPIMS plasma
JF  - Journal of physics D: Applied physics
VL  - 51
IS  - 9
SP  - nestránkováno
EP  - nestránkováno
PB  - IOP Publishing Ltd.
SN  - 00223727
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spokes
KW  - plasma diagnostics
UR  - http://dx.doi.org/10.1088/1361-6463/aaa7d3
N2  - The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.
ER  -

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE and Petr VAŠINA. Effect of magnetic field on spoke behaviour in HiPIMS plasma. \textit{Journal of physics D: Applied physics}. Bristol, England: IOP Publishing Ltd., 2018, vol.~51, No~9, p.~nestránkováno, 8 pp. ISSN~0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/aaa7d3.

Detailed Information on Publication Record