Effect of magnetic field on spoke behaviour in HiPIMS plasma

HNILICA, Jaroslav, Peter KLEIN, Marta ŠLAPANSKÁ, Matej FEKETE and Petr VAŠINA. Effect of magnetic field on spoke behaviour in HiPIMS plasma. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., 2018, vol. 51, No 9, p. nestránkováno, 8 pp. ISSN 0022-3727. Available from: https://dx.doi.org/10.1088/1361-6463/aaa7d3.

Basic information

• Original name: Effect of magnetic field on spoke behaviour in HiPIMS plasma
• Authors: HNILICA, Jaroslav (203 Czech Republic, guarantor, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution), Marta ŠLAPANSKÁ (203 Czech Republic, belonging to the institution), Matej FEKETE (703 Slovakia, belonging to the institution) and Petr VAŠINA (203 Czech Republic, belonging to the institution).
• Edition: Journal of physics D: Applied physics, Bristol, England, IOP Publishing Ltd. 2018, 0022-3727.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United Kingdom of Great Britain and Northern Ireland
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 2.829
• RIV identification code: RIV/00216224:14310/18:00100935
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1088/1361-6463/aaa7d3
• UT WoS: 000424898300002
• Keywords in English: magnetron sputtering; HiPIMS; spokes; plasma diagnostics
• Tags: International impact, Reviewed

Abstract

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

Links

• GA15-00863S, research and development project: Name: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Czech Science Foundation

• LO1411, research and development project: Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR