Plasma Processing and ALD Modification of Multi-walled Carbon
Nanotubes for Ammonia Gas Sensing

k 2018

Plasma Processing and ALD Modification of Multi-walled Carbon Nanotubes for Ammonia Gas Sensing

KAUSHIK, Preeti; Marek ELIÁŠ; Dirk HEGEMANN; Jan MICHALICKA; Lenka ZAJÍČKOVÁ et. al.

Basic information

Original name

Plasma Processing and ALD Modification of Multi-walled Carbon Nanotubes for Ammonia Gas Sensing

Authors

KAUSHIK, Preeti; Marek ELIÁŠ; Dirk HEGEMANN; Jan MICHALICKA; Lenka ZAJÍČKOVÁ and Jan PRÁŠEK

Edition

SVC TechCon 2018, 2018

Other information

Language

English

Type of outcome

Presentations at conferences

Country of publisher

United States of America

Confidentiality degree

is not subject to a state or trade secret

Organization unit

Central European Institute of Technology

ISBN

978-1-878068-28-6

Keywords in English

carbon nanotubes, atomic layer deposition, ammonia, titanium dioxide

Changed: 26/3/2019 15:59, Mgr. Pavla Foltynová, Ph.D.

Abstract

In the original language

Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if the surface reactive sites exist. CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film prior to ALD of TiO2 was also applied. The thinnest TiO2 film formed island-like structure but the carboxyl PPs improved the film uniformity as observed by transmission electron microscopy. Raman spectroscopy revealed increased structural disorder of sp2 carbon when coated by TiO2 or carboxyl PP. The highest sensor response to NH3 was obtained for the thinnest TiO2 film and the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.

Links

LQ1601, research and development project

Name: CEITEC 2020 (Acronym: CEITEC2020)

Investor: Ministry of Education, Youth and Sports of the CR

Cite

KAUSHIK, Preeti; Marek ELIÁŠ; Dirk HEGEMANN; Jan MICHALICKA; Lenka ZAJÍČKOVÁ and Jan PRÁŠEK. Plasma Processing and ALD Modification of Multi-walled Carbon Nanotubes for Ammonia Gas Sensing. In SVC TechCon 2018. 2018. ISBN 978-1-878068-28-6.

@proceedings{1427716,
   author = {Kaushik, Preeti and Eliáš, Marek and Hegemann, Dirk and Michalicka, Jan and Zajíčková, Lenka and Prášek, Jan},
   booktitle = {SVC TechCon 2018},
   keywords = {carbon nanotubes, atomic layer deposition, ammonia, titanium dioxide},
   language = {eng},
   isbn = {978-1-878068-28-6},
   title = {Plasma Processing and ALD Modification of Multi-walled Carbon Nanotubes for Ammonia Gas Sensing},
   year = {2018}
}

TY  - CONF
ID  - 1427716
AU  - Kaushik, Preeti - Eliáš, Marek - Hegemann, Dirk - Michalicka, Jan - Zajíčková, Lenka - Prášek, Jan
PY  - 2018
TI  - Plasma Processing and ALD Modification of Multi-walled Carbon Nanotubes for Ammonia Gas Sensing
SN  - 9781878068286
KW  - carbon nanotubes, atomic layer deposition, ammonia, titanium dioxide
N2  - Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if the surface reactive sites exist. CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film prior to ALD of TiO2 was also applied. The thinnest TiO2 film formed island-like structure but the carboxyl PPs improved the film uniformity as observed by transmission electron microscopy. Raman spectroscopy revealed increased structural disorder of sp2 carbon when coated by TiO2 or carboxyl PP. The highest sensor response to NH3 was obtained for the thinnest TiO2 film and the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.
ER  -

Přehled o publikaci