OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK and Daniel FRANTA. Ellipsometry of Layered Systems. In Olaf Stenzel, Miloslav Ohlídal. Optical Characterization of Thin Solid Films. Cham: Springer, 2018, p. 233-267. Springer Series in Surface Sciences, volume 64. ISBN 978-3-319-75324-9. Available from: https://dx.doi.org/10.1007/978-3-319-75325-6_9.
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Basic information
Original name Ellipsometry of Layered Systems
Authors OHLÍDAL, Ivan (203 Czech Republic, belonging to the institution), Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Martin ČERMÁK (203 Czech Republic, belonging to the institution) and Daniel FRANTA (203 Czech Republic, belonging to the institution).
Edition Cham, Optical Characterization of Thin Solid Films, p. 233-267, 35 pp. Springer Series in Surface Sciences, volume 64, 2018.
Publisher Springer
Other information
Original language English
Type of outcome Chapter(s) of a specialized book
Field of Study 10306 Optics
Country of publisher Switzerland
Confidentiality degree is not subject to a state or trade secret
Publication form printed version "print"
WWW odkaz na stránku nakladatele
RIV identification code RIV/00216224:14310/18:00104686
Organization unit Faculty of Science
ISBN 978-3-319-75324-9
Doi http://dx.doi.org/10.1007/978-3-319-75325-6_9
UT WoS 000441388800011
Keywords in English Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques
Tags topvydavatel
Changed by Changed by: Mgr. Jiří Vohánka, Ph.D., učo 60662. Changed: 28/11/2018 15:17.
Abstract
In this chapter the theoretical aspects of ellipsometry and their applications in optics of layered systems are presented. The basic formulae of the theory of ellipsometric measurements are introduced. For this purpose the Jones and Stokes--Mueller matrix formalisms are used. By using these formalisms the individual types of ellipsometry and the most utilized ellipsometric techniques are briefly described. Furthermore, the matrix formalisms enabling us to derive the formulae for the optical quantities of optically isotropic and anisotropic layered systems are described as well. Applications of the matrix formalisms in practice are illustrated by means of three examples.
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LO1411, research and development projectName: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)
Investor: Ministry of Education, Youth and Sports of the CR
PrintDisplayed: 14/7/2024 19:08