Ellipsometry of Layered Systems

C 2018

Ellipsometry of Layered Systems

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK and Daniel FRANTA

Basic information

Original name

Ellipsometry of Layered Systems

Authors

OHLÍDAL, Ivan (203 Czech Republic, belonging to the institution), Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Martin ČERMÁK (203 Czech Republic, belonging to the institution) and Daniel FRANTA (203 Czech Republic, belonging to the institution)

Edition

Cham, Optical Characterization of Thin Solid Films, p. 233-267, 35 pp. Springer Series in Surface Sciences, volume 64, 2018

Publisher

Springer

Other information

Language

English

Type of outcome

Kapitola resp. kapitoly v odborné knize

Field of Study

10306 Optics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

Publication form

printed version "print"

References:

odkaz na stránku nakladatele

RIV identification code

RIV/00216224:14310/18:00104686

Organization unit

Faculty of Science

ISBN

978-3-319-75324-9

DOI

http://dx.doi.org/10.1007/978-3-319-75325-6_9

UT WoS

000441388800011

Keywords in English

Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques

Abstract

V originále

In this chapter the theoretical aspects of ellipsometry and their applications in optics of layered systems are presented. The basic formulae of the theory of ellipsometric measurements are introduced. For this purpose the Jones and Stokes--Mueller matrix formalisms are used. By using these formalisms the individual types of ellipsometry and the most utilized ellipsometric techniques are briefly described. Furthermore, the matrix formalisms enabling us to derive the formulae for the optical quantities of optically isotropic and anisotropic layered systems are described as well. Applications of the matrix formalisms in practice are illustrated by means of three examples.

Links

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK and Daniel FRANTA. Ellipsometry of Layered Systems. In Olaf Stenzel, Miloslav Ohlídal. Optical Characterization of Thin Solid Films. Cham: Springer, 2018, p. 233-267. Springer Series in Surface Sciences, volume 64. ISBN 978-3-319-75324-9. Available from: https://dx.doi.org/10.1007/978-3-319-75325-6_9.

@inbook{1472962,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Čermák, Martin and Franta, Daniel},
   address = {Cham},
   booktitle = {Optical Characterization of Thin Solid Films},
   doi = {http://dx.doi.org/10.1007/978-3-319-75325-6_9},
   editor = {Olaf Stenzel, Miloslav Ohlídal},
   keywords = {Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques},
   howpublished = {tištěná verze "print"},
   language = {eng},
   location = {Cham},
   isbn = {978-3-319-75324-9},
   pages = {233-267},
   publisher = {Springer},
   title = {Ellipsometry of Layered Systems},
   url = {https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9},
   year = {2018}
}

TY  - CHAP
ID  - 1472962
AU  - Ohlídal, Ivan - Vohánka, Jiří - Čermák, Martin - Franta, Daniel
PY  - 2018
TI  - Ellipsometry of Layered Systems
VL  - Springer Series in Surface Sciences, volume 64
PB  - Springer
CY  - Cham
SN  - 9783319753249
KW  - Layered systems;Jones formalism;Stokes–Mueller formalism;Yeh formalism;Ellipsometry;Ellipsometric techniques
UR  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9
L2  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_9
N2  - In this chapter the theoretical aspects of ellipsometry and their applications in optics of layered systems are presented. The basic formulae of the theory of ellipsometric measurements are introduced. For this purpose the Jones and Stokes--Mueller matrix formalisms are used. By using these formalisms the individual types of ellipsometry and the most utilized ellipsometric techniques are briefly described. Furthermore, the matrix formalisms enabling us to derive the formulae for the optical quantities of optically isotropic and anisotropic layered systems are described as well. Applications of the matrix formalisms in practice are illustrated by means of three examples.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Martin ČERMÁK and Daniel FRANTA. Ellipsometry of Layered Systems. In Olaf Stenzel, Miloslav Ohlídal. \textit{Optical Characterization of Thin Solid Films}. Cham: Springer, 2018, p.~233-267. Springer Series in Surface Sciences, volume 64. ISBN~978-3-319-75324-9. Available from: https://dx.doi.org/10.1007/978-3-319-75325-6\_{}9.

Detailed Information on Publication Record