Optical Characterization of Thin Films Exhibiting Defects

C 2018

Optical Characterization of Thin Films Exhibiting Defects

OHLÍDAL, Ivan, Martin ČERMÁK and Jiří VOHÁNKA

Basic information

Original name

Optical Characterization of Thin Films Exhibiting Defects

Authors

OHLÍDAL, Ivan (203 Czech Republic, belonging to the institution), Martin ČERMÁK (203 Czech Republic, belonging to the institution) and Jiří VOHÁNKA (203 Czech Republic, belonging to the institution)

Edition

Cham, Optical Characterization of Thin Solid Films, p. 271-313, 43 pp. Springer Series in Surface Sciences, volume 64, 2018

Publisher

Springer

Other information

Language

English

Type of outcome

Kapitola resp. kapitoly v odborné knize

Field of Study

10306 Optics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

Publication form

printed version "print"

References:

odkaz na stránku nakladatele

RIV identification code

RIV/00216224:14310/18:00104687

Organization unit

Faculty of Science

ISBN

978-3-319-75324-9

DOI

http://dx.doi.org/10.1007/978-3-319-75325-6_10

UT WoS

000441388800012

Keywords in English

Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers

Abstract

V originále

In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.

Links

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

OHLÍDAL, Ivan, Martin ČERMÁK and Jiří VOHÁNKA. Optical Characterization of Thin Films Exhibiting Defects. In Olaf Stenzel, Miloslav Ohlídal. Optical Characterization of Thin Solid Films. Cham: Springer, 2018, p. 271-313. Springer Series in Surface Sciences, volume 64. ISBN 978-3-319-75324-9. Available from: https://dx.doi.org/10.1007/978-3-319-75325-6_10.

@inbook{1472963,
   author = {Ohlídal, Ivan and Čermák, Martin and Vohánka, Jiří},
   address = {Cham},
   booktitle = {Optical Characterization of Thin Solid Films},
   doi = {http://dx.doi.org/10.1007/978-3-319-75325-6_10},
   editor = {Olaf Stenzel, Miloslav Ohlídal},
   keywords = {Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers},
   howpublished = {tištěná verze "print"},
   language = {eng},
   location = {Cham},
   isbn = {978-3-319-75324-9},
   pages = {271-313},
   publisher = {Springer},
   title = {Optical Characterization of Thin Films Exhibiting Defects},
   url = {https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10},
   year = {2018}
}

TY  - CHAP
ID  - 1472963
AU  - Ohlídal, Ivan - Čermák, Martin - Vohánka, Jiří
PY  - 2018
TI  - Optical Characterization of Thin Films Exhibiting Defects
VL  - Springer Series in Surface Sciences, volume 64
PB  - Springer
CY  - Cham
SN  - 9783319753249
KW  - Thin film defects;Boundary roughness;Thickness non-uniformity;Optical inhomogeneity;Overlayers;Transition-layers
UR  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10
L2  - https://link.springer.com/chapter/10.1007/978-3-319-75325-6_10
N2  - In this chapter the influence of the main defects on the optical characterization of thin films is described. These defects are random roughness of boundaries, thickness non-uniformity, optical inhomogeneity corresponding to refractive index profiles, overlayers and transition layers. The theoretical approaches and the formulae for the corresponding optical quantities of the thin films exhibiting these defects are presented. The attention is concentrated on the ellipsometric parameters and reflectance of these thin films belonging to the specular reflection. The selected numerical examples illustrating the influence of the defects are introduced. Several experimental examples of the optical characterization of the thin films with the defects are also shown. The discussion of both the numerical and experimental results is carried out too.
ER  -

OHLÍDAL, Ivan, Martin ČERMÁK and Jiří VOHÁNKA. Optical Characterization of Thin Films Exhibiting Defects. In Olaf Stenzel, Miloslav Ohlídal. \textit{Optical Characterization of Thin Solid Films}. Cham: Springer, 2018, p.~271-313. Springer Series in Surface Sciences, volume 64. ISBN~978-3-319-75324-9. Available from: https://dx.doi.org/10.1007/978-3-319-75325-6\_{}10.

Detailed Information on Publication Record