| OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK and Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. Surface and Interface Analysis. Wiley, 2018, vol. 50, No 11, p. 1230-1233. ISSN 0142-2421. Available from: https://dx.doi.org/10.1002/sia.6463. |
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@article{1472996,
author = {Ohlídal, Ivan and Vohánka, Jiří and Mistrík, Jan and Čermák, Martin and Franta, Daniel},
article_number = {11},
doi = {http://dx.doi.org/10.1002/sia.6463},
keywords = {native oxide layers;optical characterization;roughness;silicon surfaces},
language = {eng},
issn = {0142-2421},
journal = {Surface and Interface Analysis},
title = {Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers},
url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463},
volume = {50},
year = {2018}
}
TY - JOUR
ID - 1472996
AU - Ohlídal, Ivan - Vohánka, Jiří - Mistrík, Jan - Čermák, Martin - Franta, Daniel
PY - 2018
TI - Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers
JF - Surface and Interface Analysis
VL - 50
IS - 11
SP - 1230-1233
EP - 1230-1233
PB - Wiley
SN - 01422421
KW - native oxide layers;optical characterization;roughness;silicon surfaces
UR - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
L2 - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
N2 - Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.
ER -
OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK and Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. \textit{Surface and Interface Analysis}. Wiley, 2018, vol.~50, No~11, p.~1230-1233. ISSN~0142-2421. Available from: https://dx.doi.org/10.1002/sia.6463.
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