Different theoretical approaches at optical characterization of
randomly rough silicon surfaces covered with native oxide
layers

J 2018

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK, Daniel FRANTA et. al.

Basic information

Original name

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

Authors

OHLÍDAL, Ivan (203 Czech Republic, belonging to the institution), Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Jan MISTRÍK (203 Czech Republic, belonging to the institution), Martin ČERMÁK (203 Czech Republic, belonging to the institution) and Daniel FRANTA (203 Czech Republic, belonging to the institution)

Edition

Surface and Interface Analysis, Wiley, 2018, 0142-2421

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

odkaz na stránku nakladatele

Impact factor

Impact factor: 1.319

RIV identification code

RIV/00216224:14310/18:00104690

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1002/sia.6463

UT WoS

000448889600046

Keywords in English

native oxide layers;optical characterization;roughness;silicon surfaces

Změněno: 2/5/2019 16:16, Mgr. Tereza Miškechová

Abstract

V originále

Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.

Links

LO1411, research and development project

Name: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Acronym: CEPLANT plus)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK and Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. Surface and Interface Analysis. Wiley, 2018, vol. 50, No 11, p. 1230-1233. ISSN 0142-2421. Available from: https://dx.doi.org/10.1002/sia.6463.

@article{1472996,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Mistrík, Jan and Čermák, Martin and Franta, Daniel},
   article_number = {11},
   doi = {http://dx.doi.org/10.1002/sia.6463},
   keywords = {native oxide layers;optical characterization;roughness;silicon surfaces},
   language = {eng},
   issn = {0142-2421},
   journal = {Surface and Interface Analysis},
   title = {Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers},
   url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463},
   volume = {50},
   year = {2018}
}

TY  - JOUR
ID  - 1472996
AU  - Ohlídal, Ivan - Vohánka, Jiří - Mistrík, Jan - Čermák, Martin - Franta, Daniel
PY  - 2018
TI  - Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers
JF  - Surface and Interface Analysis
VL  - 50
IS  - 11
SP  - 1230-1233
EP  - 1230-1233
PB  - Wiley
SN  - 01422421
KW  - native oxide layers;optical characterization;roughness;silicon surfaces
UR  - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
L2  - https://onlinelibrary.wiley.com/doi/abs/10.1002/sia.6463
N2  - Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK and Daniel FRANTA. Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers. \textit{Surface and Interface Analysis}. Wiley, 2018, vol.~50, No~11, p.~1230-1233. ISSN~0142-2421. Available from: https://dx.doi.org/10.1002/sia.6463.

Detailed Information on Publication Record