HNILICA, Jaroslav, Peter KLEIN, Katarína BERNÁTOVÁ, Marta ŠLAPANSKÁ and Petr VAŠINA. Souhrnná výzkumná zpráva pro depozici magnetronem (Research report for magnetron deposition). Brno: MU, 2018, 16 pp.
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Basic information
Original name Souhrnná výzkumná zpráva pro depozici magnetronem
Name in Czech Souhrnná výzkumná zpráva pro depozici magnetronem
Name (in English) Research report for magnetron deposition
Authors HNILICA, Jaroslav (203 Czech Republic, guarantor, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution), Katarína BERNÁTOVÁ (703 Slovakia, belonging to the institution), Marta ŠLAPANSKÁ (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, belonging to the institution).
Edition Brno, 16 pp. 2018.
Publisher MU
Other information
Original language Czech
Type of outcome Research report
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/18:00101874
Organization unit Faculty of Science
Keywords in English magnetron sputtering; deposition process; QCM; HFM
Changed by Changed by: doc. Mgr. Jaroslav Hnilica, Ph.D., učo 106259. Changed: 10/1/2019 13:05.
Abstract
Výzkumná zpráva shrnuje výsledky prováděných v rámci projektu TAČR ZETA.
Abstract (in English)
The research report summarizes the results of the TAČR ZETA project.
Links
TJ01000157, research and development projectName: Optimalizace procesu depozice průmyslových ochranných povlaků
Investor: Technology Agency of the Czech Republic
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