Atomic layer deposition of titanium dioxide on multi-walled
carbon nanotubes for ammonia gas sensing

J 2019

Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

KAUSHIK, Preeti, Marek ELIÁŠ, Jan MICHALICKA, Dirk HEGEMANN, Zdenek PYTLÍČEK et. al.

Basic information

Original name

Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Authors

KAUSHIK, Preeti (356 India, belonging to the institution), Marek ELIÁŠ (203 Czech Republic), Jan MICHALICKA, Dirk HEGEMANN, Zdenek PYTLÍČEK, David NEČAS (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor, belonging to the institution)

Edition

Surface & coatings technology, Lausanne, Elsevier, 2019, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Full Text

Impact factor

Impact factor: 3.784

RIV identification code

RIV/00216224:14310/19:00109858

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2019.04.031

UT WoS

000471083100024

Keywords in English

Carbon nanotubes; Chemiresistive sensor; Ammonia; Titanium dioxide; Atomic layer deposition; Carboxyl plasma polymer

Abstract

V originále

Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if reactive sites exist on the surface. The CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film was applied prior to ALD of TiO2. The carboxyl PPs improved film uniformity, even though the thinnest TiO2 film still formed an island-like structure. Raman spectroscopy revealed that coating by TiO2 or carboxyl PP increased structural disorder of sp2 carbon in the MWCNTs and the thinnest TiO2 coatings induced the lowest disorder. The thinnest coatings also resulted in the highest sensor response to NH3. Nevertheless, for all thicknesses the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.

Links

LM2015041, research and development project

Name: CEITEC Nano

Investor: Ministry of Education, Youth and Sports of the CR

LQ1601, research and development project

Name: CEITEC 2020 (Acronym: CEITEC2020)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

KAUSHIK, Preeti, Marek ELIÁŠ, Jan MICHALICKA, Dirk HEGEMANN, Zdenek PYTLÍČEK, David NEČAS and Lenka ZAJÍČKOVÁ. Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. Surface & coatings technology. Lausanne: Elsevier, 2019, vol. 370, JUL 25 2019, p. 235-243. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.04.031.

@article{1537497,
   author = {Kaushik, Preeti and Eliáš, Marek and Michalicka, Jan and Hegemann, Dirk and Pytlíček, Zdenek and Nečas, David and Zajíčková, Lenka and Zajickova, Lenka},
   article_location = {Lausanne},
   article_number = {JUL 25 2019},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.04.031},
   keywords = {Carbon nanotubes; Chemiresistive sensor; Ammonia; Titanium dioxide; Atomic layer deposition; Carboxyl plasma polymer},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & coatings technology},
   note = {doc. Zajíčková - dle domluvy ředitelů 5.3.2024},
   title = {Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing},
   url = {https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub},
   volume = {370},
   year = {2019}
}

TY  - JOUR
ID  - 1537497
AU  - Kaushik, Preeti - Eliáš, Marek - Michalicka, Jan - Hegemann, Dirk - Pytlíček, Zdenek - Nečas, David - Zajíčková, Lenka - Zajickova, Lenka
PY  - 2019
TI  - Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing
JF  - Surface & coatings technology
VL  - 370
IS  - JUL 25 2019
SP  - 235-243
EP  - 235-243
PB  - Elsevier
SN  - 02578972
N1  - doc. Zajíčková - dle domluvy ředitelů 5.3.2024
KW  - Carbon nanotubes
KW  - Chemiresistive sensor
KW  - Ammonia
KW  - Titanium dioxide
KW  - Atomic layer deposition
KW  - Carboxyl plasma polymer
UR  - https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub
L2  - https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub
N2  - Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if reactive sites exist on the surface. The CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film was applied prior to ALD of TiO2. The carboxyl PPs improved film uniformity, even though the thinnest TiO2 film still formed an island-like structure. Raman spectroscopy revealed that coating by TiO2 or carboxyl PP increased structural disorder of sp2 carbon in the MWCNTs and the thinnest TiO2 coatings induced the lowest disorder. The thinnest coatings also resulted in the highest sensor response to NH3. Nevertheless, for all thicknesses the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.
ER  -

KAUSHIK, Preeti, Marek ELIÁŠ, Jan MICHALICKA, Dirk HEGEMANN, Zdenek PYTLÍČEK, David NEČAS and Lenka ZAJÍČKOVÁ. Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. \textit{Surface \&{} coatings technology}. Lausanne: Elsevier, 2019, vol.~370, JUL 25 2019, p.~235-243. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.04.031.

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