| KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK and Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. Surface & Coatings Technology. Lausanne: ELSEVIER SCIENCE SA, 2019, vol. 377, No 2019, p. 1-9. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077. |
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@article{1558616,
author = {Kroker, Michael and Czigány, Zsolt and Zdeněk, Weiss and Fekete, Matej and Souček, Pavel and Balázsi, Katalin and Sochora, Vjačeslav and Jílek, Mojmír and Vašina, Petr},
article_location = {Lausanne},
article_number = {2019},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.07.077},
keywords = {Physical vapor deposition; WBC; Multi-axis rotation; Multilayer},
language = {eng},
issn = {0257-8972},
journal = {Surface & Coatings Technology},
title = {On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target},
url = {https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub},
volume = {377},
year = {2019}
}
TY - JOUR
ID - 1558616
AU - Kroker, Michael - Czigány, Zsolt - Zdeněk, Weiss - Fekete, Matej - Souček, Pavel - Balázsi, Katalin - Sochora, Vjačeslav - Jílek, Mojmír - Vašina, Petr
PY - 2019
TI - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target
JF - Surface & Coatings Technology
VL - 377
IS - 2019
SP - 1-9
EP - 1-9
PB - ELSEVIER SCIENCE SA
SN - 02578972
KW - Physical vapor deposition
KW - WBC
KW - Multi-axis rotation
KW - Multilayer
UR - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub
L2 - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub
N2 - Multilayered coatings are routinely obtained in non-reactive processes employing multiple sources or in processes with a reactive gas. W-B-C coatings were sputter deposited in an industrial sputtering system in a non-reactive atmosphere onto substrates performing one- and two-axis rotations around a central cylindrical target composed of boron-carbide, tungsten and graphite ring-shaped segments. This study describes the unexpected multilayered structure of W-B-C coatings deposited by even the non-reactive sputtering of a single target. This multilayered structure exhibits a modulation of the chemical composition. While the tungsten content in a layer decreases, the amount of boron and carbon rises. The modulation period corresponds with the calculated thickness increment per one sample revolution around the central cathode. Experiments proved that the chemical composition of a coating and its deposition rate are very sensitive to the substrate position in the chamber. This was attributed to the different transport pathways of heavy (W) and light (C and B) atoms sputtered from the same target, but differently scattered by the working argon gas.
ER -
KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK and Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. \textit{Surface \&{} Coatings Technology}. Lausanne: ELSEVIER SCIENCE SA, 2019, vol.~377, No~2019, p.~1-9. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077.
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