KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK and Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. Surface & Coatings Technology. Lausanne: ELSEVIER SCIENCE SA, 2019, vol. 377, No 2019, p. 1-9. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077. |
Other formats:
BibTeX
LaTeX
RIS
@article{1558616, author = {Kroker, Michael and Czigány, Zsolt and Zdeněk, Weiss and Fekete, Matej and Souček, Pavel and Balázsi, Katalin and Sochora, Vjačeslav and Jílek, Mojmír and Vašina, Petr}, article_location = {Lausanne}, article_number = {2019}, doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.07.077}, keywords = {Physical vapor deposition; WBC; Multi-axis rotation; Multilayer}, language = {eng}, issn = {0257-8972}, journal = {Surface & Coatings Technology}, title = {On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target}, url = {https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub}, volume = {377}, year = {2019} }
TY - JOUR ID - 1558616 AU - Kroker, Michael - Czigány, Zsolt - Zdeněk, Weiss - Fekete, Matej - Souček, Pavel - Balázsi, Katalin - Sochora, Vjačeslav - Jílek, Mojmír - Vašina, Petr PY - 2019 TI - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target JF - Surface & Coatings Technology VL - 377 IS - 2019 SP - 1-9 EP - 1-9 PB - ELSEVIER SCIENCE SA SN - 02578972 KW - Physical vapor deposition KW - WBC KW - Multi-axis rotation KW - Multilayer UR - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub L2 - https://www.sciencedirect.com/science/article/pii/S025789721930828X?via%3Dihub N2 - Multilayered coatings are routinely obtained in non-reactive processes employing multiple sources or in processes with a reactive gas. W-B-C coatings were sputter deposited in an industrial sputtering system in a non-reactive atmosphere onto substrates performing one- and two-axis rotations around a central cylindrical target composed of boron-carbide, tungsten and graphite ring-shaped segments. This study describes the unexpected multilayered structure of W-B-C coatings deposited by even the non-reactive sputtering of a single target. This multilayered structure exhibits a modulation of the chemical composition. While the tungsten content in a layer decreases, the amount of boron and carbon rises. The modulation period corresponds with the calculated thickness increment per one sample revolution around the central cathode. Experiments proved that the chemical composition of a coating and its deposition rate are very sensitive to the substrate position in the chamber. This was attributed to the different transport pathways of heavy (W) and light (C and B) atoms sputtered from the same target, but differently scattered by the working argon gas. ER -
KROKER, Michael, Zsolt CZIGÁNY, Weiss ZDENĚK, Matej FEKETE, Pavel SOUČEK, Katalin BALÁZSI, Vjačeslav SOCHORA, Mojmír JÍLEK and Petr VAŠINA. On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target. \textit{Surface \&{} Coatings Technology}. Lausanne: ELSEVIER SCIENCE SA, 2019, vol.~377, No~2019, p.~1-9. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2019.07.077.
|