| OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK, František VIŽĎA a Daniel FRANTA. Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model. Thin Solid Films. Elsevier, 2019, roč. 692, 31 December 2019, s. 1-17. ISSN 0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2019.03.001. |
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@article{1598679,
author = {Ohlídal, Ivan and Vohánka, Jiří and Mistrík, Jan and Čermák, Martin and Vižďa, František and Franta, Daniel},
article_number = {31 December 2019},
doi = {http://dx.doi.org/10.1016/j.tsf.2019.03.001},
keywords = {Reflectance;Transmittance;Ellipsometric parameters;Inhomogeneous thin films},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model},
url = {https://www.sciencedirect.com/science/article/pii/S0040609019301385},
volume = {692},
year = {2019}
}
TY - JOUR
ID - 1598679
AU - Ohlídal, Ivan - Vohánka, Jiří - Mistrík, Jan - Čermák, Martin - Vižďa, František - Franta, Daniel
PY - 2019
TI - Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model
JF - Thin Solid Films
VL - 692
IS - 31 December 2019
SP - 1-17
EP - 1-17
PB - Elsevier
SN - 00406090
KW - Reflectance;Transmittance;Ellipsometric parameters;Inhomogeneous thin films
UR - https://www.sciencedirect.com/science/article/pii/S0040609019301385
L2 - https://www.sciencedirect.com/science/article/pii/S0040609019301385
N2 - A multiple-beam interference model is used to derive approximate formulae for the reflection and transmission coefficients of inhomogeneous thin films exhibiting large gradients of refractive index profiles. It is shown that these formulae are constituted by series containing the Wentzel-Kramers-Brillouin-Jeffreys term and correction terms with increasing order corresponding to number of considered internal reflections inside the films. A numerical analysis enabling us to show the influence of a degree of inhomogeneity on spectral dependencies of reflectance and ellipsometric parameters of inhomogeneous films is performed. Advantages and disadvantages of our approach compared with other approximate approaches are discussed. The optical characterization of a selected non-stoichiometric silicon nitride film prepared by reactive magnetron sputtering onto silicon single crystal substrate is performed for illustration of using our formulae in practice.
ER -
OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan MISTRÍK, Martin ČERMÁK, František VIŽĎA a Daniel FRANTA. Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model. \textit{Thin Solid Films}. Elsevier, 2019, roč.~692, 31 December 2019, s.~1-17. ISSN~0040-6090. Dostupné z: https://dx.doi.org/10.1016/j.tsf.2019.03.001.
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