| OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK and Daniel FRANTA. Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2019, vol. 37, No 6, p. "062921-1"-"062921-10", 10 pp. ISSN 2166-2746. Available from: https://dx.doi.org/10.1116/1.5122014. |
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@article{1598865,
author = {Ohlídal, Ivan and Vohánka, Jiří and Buršíková, Vilma and Ženíšek, Jaroslav and Vašina, Petr and Čermák, Martin and Franta, Daniel},
article_number = {6},
doi = {http://dx.doi.org/10.1116/1.5122014},
keywords = {Optical constants;Optical absorption;Reflectometry;Magnetron sputtering;Optical metrology;Thin films;Chemical vapor deposition;Optical properties},
language = {eng},
issn = {2166-2746},
journal = {Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics},
title = {Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model},
url = {https://doi.org/10.1116/1.5122014},
volume = {37},
year = {2019}
}
TY - JOUR
ID - 1598865
AU - Ohlídal, Ivan - Vohánka, Jiří - Buršíková, Vilma - Ženíšek, Jaroslav - Vašina, Petr - Čermák, Martin - Franta, Daniel
PY - 2019
TI - Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
VL - 37
IS - 6
SP - "062921-1"-"062921-10"
EP - "062921-1"-"062921-10"
SN - 21662746
KW - Optical constants;Optical absorption;Reflectometry;Magnetron sputtering;Optical metrology;Thin films;Chemical vapor deposition;Optical properties
UR - https://doi.org/10.1116/1.5122014
L2 - https://doi.org/10.1116/1.5122014
N2 - This paper presents the results of the optical characterization of inhomogeneous thin films of polymer-like SiOxCyHz and non-stoichiometric silicon nitride SiNx. An efficient method combining variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied at the near-normal incidence based on the multiple-beam interference model is utilized for this optical characterization. The multiple-beam interference model allows us to quickly evaluate the values of ellipsometric parameters and reflectance of the inhomogeneous thin films, which exhibit general profiles of their optical constants. The spectral dependencies of the optical constants of the inhomogeneous SiOxCyHz and SiNx thin films are determined using the Campi–Coriasso dispersion model. The profiles of the optical constants of these films can also be determined. Furthermore, the transition layers at the lower boundaries of the characterized films are also taken into account. Spectral dependencies of the optical constants of these transition layers are also determined using the Campi–Coriasso dispersion model.
ER -
OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jaroslav ŽENÍŠEK, Petr VAŠINA, Martin ČERMÁK and Daniel FRANTA. Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model. \textit{Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics}. 2019, vol.~37, No~6, p.~''062921-1''-''062921-10'', 10 pp. ISSN~2166-2746. Available from: https://dx.doi.org/10.1116/1.5122014.
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