| KUBEČKA, Martin, Adam OBRUSNÍK, Petr ZIKÁN, Mojmír JÍLEK, Juris VENCELS a Zdeněk BONAVENTURA. Predictive simulation of antenna effect in PVD processes using fluid models. SURFACE & COATINGS TECHNOLOGY. LAUSANNE: ELSEVIER SCIENCE SA, 2019, roč. 379, DEC 15 2019, s. 1-7. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.125045. |
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@article{1627934,
author = {Kubečka, Martin and Obrusník, Adam and Zikán, Petr and Jílek, Mojmír and Vencels, Juris and Bonaventura, Zdeněk},
article_location = {LAUSANNE},
article_number = {DEC 15 2019},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.125045},
keywords = {PVD; Antenna effect; Edge effect; Vacuum arc; Titanium nitride; Simulation; Model},
language = {eng},
issn = {0257-8972},
journal = {SURFACE & COATINGS TECHNOLOGY},
title = {Predictive simulation of antenna effect in PVD processes using fluid models},
url = {https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369},
volume = {379},
year = {2019}
}
TY - JOUR
ID - 1627934
AU - Kubečka, Martin - Obrusník, Adam - Zikán, Petr - Jílek, Mojmír - Vencels, Juris - Bonaventura, Zdeněk
PY - 2019
TI - Predictive simulation of antenna effect in PVD processes using fluid models
JF - SURFACE & COATINGS TECHNOLOGY
VL - 379
IS - DEC 15 2019
SP - 1-7
EP - 1-7
PB - ELSEVIER SCIENCE SA
SN - 02578972
KW - PVD
KW - Antenna effect
KW - Edge effect
KW - Vacuum arc
KW - Titanium nitride
KW - Simulation
KW - Model
UR - https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369
L2 - https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369
N2 - We present numerical simulation of an ion-based physical vapor deposition coating process on a realistic part. The simulation is performed using a fluid model. By correlating the simulated ion flux to the surface of the coated part with experimentally measured thickness of the coating at the same conditions, it is shown that the model is capable of capturing the so-called antenna effect (edge effect). This local increase of coating thickness close to sharp edges of the part is a consequence of the plasma sheath of a negatively biased coated part. Additionally, we assess the sensitivity of the model to the boundary conditions imposed.
ER -
KUBEČKA, Martin, Adam OBRUSNÍK, Petr ZIKÁN, Mojmír JÍLEK, Juris VENCELS a Zdeněk BONAVENTURA. Predictive simulation of antenna effect in PVD processes using fluid models. \textit{SURFACE \&{}amp; COATINGS TECHNOLOGY}. LAUSANNE: ELSEVIER SCIENCE SA, 2019, roč.~379, DEC 15 2019, s.~1-7. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.125045.
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