Detailed Information on Publication Record
2019
Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture
ANGUŠ, Michal, Lucie BLAHOVÁ, Miroslav MICHLÍČEK and Lenka ZAJÍČKOVÁBasic information
Original name
Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture
Authors
ANGUŠ, Michal (703 Slovakia, belonging to the institution), Lucie BLAHOVÁ (203 Czech Republic, belonging to the institution), Miroslav MICHLÍČEK (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution)
Edition
1st Annual CEITEC Postdoc Retreat, 2019
Other information
Language
English
Type of outcome
Konferenční abstrakt
Field of Study
10403 Physical chemistry
Country of publisher
Czech Republic
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14740/19:00113364
Organization unit
Central European Institute of Technology
Keywords in English
Optical Emission Spectroscopy; Argon and Argon Cyclopropylamine Mixture
Tags
Změněno: 26/3/2020 21:27, Mgr. Pavla Foltynová, Ph.D.
Abstract
V originále
Optical emission spectroscopy is a technique for analysis of optical radiation from plasma source (or other light sources). In this contribution we are studying light emission from argon and argon cyclopropylamine (CPA) mixture in capacitively coupled plasma generated in plasma enhanced chemical vapor deposition reactor R4 at CEITEC Nano. Pressure inside of the reactor was 50 Pa (Ar flow 10 sccm and for mixture Ar flow 10 sccm and CPA flow 1 sccm) and power was set for 5 W and 50 W for both cases. Recording of spectra was done using Andor Shamrock SR-500i coupled with Newton 971 EMCCD spectroscopic detector. Measured spectral range was from 200 nm to 1000 nm. In all measured spectra we focused on detection and identification of Argon atomic lines. In Ar–CPA mixture we observe emission of molecular fragments as well. Plasma parameter (electron temperature) using Boltzmann plot have been estimated. All argon atomic line parameters have been taken from NIST atomic spectra database1. From the results we can observe similar electron temperature for 5 W and 50 W measurements, but slight increase of temperature in case of Ar-CPA mixture.
Links
| LQ1601, research and development project |
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