Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture

ANGUŠ, Michal, Lucie BLAHOVÁ, Miroslav MICHLÍČEK and Lenka ZAJÍČKOVÁ. Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture. In 1st Annual CEITEC Postdoc Retreat. 2019.

Basic information

• Original name: Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture
• Authors: ANGUŠ, Michal (703 Slovakia, belonging to the institution), Lucie BLAHOVÁ (203 Czech Republic, belonging to the institution), Miroslav MICHLÍČEK (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution).
• Edition: 1st Annual CEITEC Postdoc Retreat, 2019.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10403 Physical chemistry
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14740/19:00113364
• Organization unit: Central European Institute of Technology
• Keywords in English: Optical Emission Spectroscopy; Argon and Argon Cyclopropylamine Mixture
• Tags: rivok

Abstract

Optical emission spectroscopy is a technique for analysis of optical radiation from plasma source (or other light sources). In this contribution we are studying light emission from argon and argon cyclopropylamine (CPA) mixture in capacitively coupled plasma generated in plasma enhanced chemical vapor deposition reactor R4 at CEITEC Nano. Pressure inside of the reactor was 50 Pa (Ar flow 10 sccm and for mixture Ar flow 10 sccm and CPA flow 1 sccm) and power was set for 5 W and 50 W for both cases. Recording of spectra was done using Andor Shamrock SR-500i coupled with Newton 971 EMCCD spectroscopic detector. Measured spectral range was from 200 nm to 1000 nm. In all measured spectra we focused on detection and identification of Argon atomic lines. In Ar–CPA mixture we observe emission of molecular fragments as well. Plasma parameter (electron temperature) using Boltzmann plot have been estimated. All argon atomic line parameters have been taken from NIST atomic spectra database1. From the results we can observe similar electron temperature for 5 W and 50 W measurements, but slight increase of temperature in case of Ar-CPA mixture.

Links

• LQ1601, research and development project: Name: CEITEC 2020 (Acronym: CEITEC2020)

Investor: Ministry of Education, Youth and Sports of the CR