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@article{1664082,
author = {Britun, Nikolay and Hnilica, Jaroslav},
article_location = {Melville (New York)},
article_number = {21},
doi = {http://dx.doi.org/10.1063/5.0006586},
keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process},
language = {eng},
issn = {0021-8979},
journal = {Journal of Applied Physics},
title = {Optical spectroscopy for sputtering process characterization},
url = {https://aip.scitation.org/doi/10.1063/5.0006586},
volume = {127},
year = {2020}
}
TY - JOUR
ID - 1664082
AU - Britun, Nikolay - Hnilica, Jaroslav
PY - 2020
TI - Optical spectroscopy for sputtering process characterization
JF - Journal of Applied Physics
VL - 127
IS - 21
SP - 1-21
EP - 1-21
PB - AIP Publishing
SN - 00218979
KW - magnetron sputtering
KW - HiPIMS
KW - spectroscopy
KW - plasma diagnostics
KW - sputtering process
UR - https://aip.scitation.org/doi/10.1063/5.0006586
L2 - https://aip.scitation.org/doi/10.1063/5.0006586
N2 - In this Tutorial, various methods of optical spectroscopy representing certain interest for magnetron discharge characterization are overviewed. The main principles, the implementation examples, and the selected results are given for each technique, accompanied by short discussions and suggestions for further reading. Both passive and active optical methods are covered, including optical absorption and laser-based techniques. The advantages and drawbacks of each diagnostic approach are critically analyzed. Special attention is devoted to the techniques extensively used by the authors in their own work, such as line ratio methods, absorption spectroscopy, interferometry, and laser-induced fluorescence.
ER -
BRITUN, Nikolay and Jaroslav HNILICA. Optical spectroscopy for sputtering process characterization. \textit{Journal of Applied Physics}. Melville (New York): AIP Publishing, 2020, vol.~127, No~21, p.~1-21. ISSN~0021-8979. Available from: https://dx.doi.org/10.1063/5.0006586.
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