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@article{1672958, author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay}, article_number = {4}, doi = {http://dx.doi.org/10.1063/5.0009378}, keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS}, language = {eng}, issn = {0021-8979}, journal = {Journal of applied physics}, title = {Revisiting particle dynamics in HiPIMS discharges. I. General effects}, url = {http://aip.scitation.org/doi/10.1063/5.0009378}, volume = {128}, year = {2020} }
TY - JOUR ID - 1672958 AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay PY - 2020 TI - Revisiting particle dynamics in HiPIMS discharges. I. General effects JF - Journal of applied physics VL - 128 IS - 4 SP - 1-14 EP - 1-14 PB - American Institute of Physics SN - 00218979 KW - magnetron sputtering KW - HiPIMS KW - spectroscopy KW - plasma diagnostics KW - sputtering process KW - LIF KW - AAS UR - http://aip.scitation.org/doi/10.1063/5.0009378 L2 - http://aip.scitation.org/doi/10.1063/5.0009378 N2 - A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)]. ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. I. General effects. \textit{Journal of applied physics}. American Institute of Physics, 2020, roč.~128, č.~4, s.~1-14. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/5.0009378.
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