Revisiting particle dynamics in HiPIMS discharges. I. General effects

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. I. General effects. Journal of applied physics. American Institute of Physics, 2020, vol. 128, No 4, p. 1-14. ISSN 0021-8979. Available from: https://dx.doi.org/10.1063/5.0009378.

Basic information

• Original name: Revisiting particle dynamics in HiPIMS discharges. I. General effects
• Authors: HNILICA, Jaroslav (203 Czech Republic, guarantor, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution), Petr VAŠINA (203 Czech Republic, belonging to the institution), Rony SNYDERS (56 Belgium) and Nikolay BRITUN (56 Belgium).
• Edition: Journal of applied physics, American Institute of Physics, 2020, 0021-8979.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 2.546
• RIV identification code: RIV/00216224:14310/20:00114256
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1063/5.0009378
• UT WoS: 000557312900001
• Keywords in English: magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS
• Tags: rivok
• Tags: International impact, Reviewed

Abstract

A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].

Links

• GA15-00863S, research and development project: Name: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Czech Science Foundation

• 90097, large research infrastructures: Name: CEPLANT