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@article{1675555,
author = {Jašek, Ondřej and Toman, Jozef and Jurmanová, Jana and Šnírer, Miroslav and Kudrle, Vít and Buršíková, Vilma},
article_location = {Lausanne},
article_number = {May 2020},
doi = {http://dx.doi.org/10.1016/j.diamond.2020.107798},
keywords = {Graphene; Microwave plasma; Ethanol; Dielectric substrate},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure},
url = {https://www.sciencedirect.com/science/article/pii/S0925963519308271},
volume = {105},
year = {2020}
}
TY - JOUR
ID - 1675555
AU - Jašek, Ondřej - Toman, Jozef - Jurmanová, Jana - Šnírer, Miroslav - Kudrle, Vít - Buršíková, Vilma
PY - 2020
TI - Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure
JF - Diamond and Related Materials
VL - 105
IS - May 2020
SP - 1-9
EP - 1-9
PB - Elsevier
SN - 09259635
KW - Graphene
KW - Microwave plasma
KW - Ethanol
KW - Dielectric substrate
UR - https://www.sciencedirect.com/science/article/pii/S0925963519308271
L2 - https://www.sciencedirect.com/science/article/pii/S0925963519308271
N2 - The initial stage of graphene layer deposition on silicon oxide substrate by ethanol decomposition in dual-channel microwave plasma torch at atmospheric pressure was studied in dependence on precursor flow rate and delivered microwave power. Depending on ethanol flow rate and substrate temperature, horizontally or vertically aligned graphene nanosheets with various density could be prepared directly on dielectric substrate. In the regime with high microwave power, above 400 W, mixture of amorphous carbon particles and graphene sheets was deposited on the substrate. Prepared layers were analyzed by scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The microwave plasma diagnostics was carried out using optical emission spectroscopy (OES). The sample analysis showed increasing density of horizontally aligned carbon nanosheets with increasing ethanol flow rate and their delamination and transition into vertically aligned graphene sheets with increasing substrate temperature. The Raman spectroscopy analysis of layers showed presence of D (1345 cm(-1)), G (1585 cm(-1)) and 2D (2685 cm(-1)) peaks with 2D/G ratio of 1.59 and full width at half maximum (FWHM) of 2D peak was 42 cm(-1), corresponding to few layer graphene structure. In case of amorphous nanoparticles deposition, the D* peak at 1210 cm(-1) and D** at 1500 seem-1 was observed in Raman spectra with D/G ratio of 1.19 and Cls XPS spectra of carbon contained 20.4 at.% of spa carbon phase in comparison to 8.3 at.% in case of graphene nanosheets layer. High D/G ratio, up to 3.5, and low intensity 2D band was characteristic for vertically aligned graphene nanosheets layers. The possibility to influence density and size of graphene nanosheets on substrate represents promising alternative for future deposition of graphene on arbitrary substrate.
ER -
JAŠEK, Ondřej, Jozef TOMAN, Jana JURMANOVÁ, Miroslav ŠNÍRER, Vít KUDRLE and Vilma BURŠÍKOVÁ. Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure. \textit{Diamond and Related Materials}. Lausanne: Elsevier, 2020, vol.~105, May 2020, p.~1-9. ISSN~0925-9635. Available from: https://dx.doi.org/10.1016/j.diamond.2020.107798.
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