| HOMOLA, Vojtěch, Roman PŘIBYL, Štěpánka KELAROVÁ, Richard VÁCLAVIK, Petr TOMŠEJ, Monika STUPAVSKÁ, Lukáš ZÁBRANSKÝ, Anna CHARVATOVA CAMPBELL, Petr KLAPETEK a Vilma BURŠÍKOVÁ. Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions. Online. In 11th International Conference on Nanomaterials - Research & Application (NANOCON 2019). Ostrava: TANGER Ltd, 2020, s. 642-647. ISBN 978-80-87294-95-6. Dostupné z: https://dx.doi.org/10.37904/nanocon.2019.8699. |
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@inproceedings{1686359,
author = {Homola, Vojtěch and Přibyl, Roman and Kelarová, Štěpánka and Václavik, Richard and Tomšej, Petr and Stupavská, Monika and Zábranský, Lukáš and Charvatova Campbell, Anna and Klapetek, Petr and Buršíková, Vilma},
address = {Ostrava},
booktitle = {11th International Conference on Nanomaterials - Research & Application (NANOCON 2019)},
doi = {http://dx.doi.org/10.37904/nanocon.2019.8699},
keywords = {PECVD; hexamethyldisiloxane; oxygen; mechanical properties; AFM; surface free energy},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-95-6},
pages = {642-647},
publisher = {TANGER Ltd},
title = {Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions},
url = {https://doi.org/10.37904/nanocon.2019.8699},
year = {2020}
}
TY - JOUR
ID - 1686359
AU - Homola, Vojtěch - Přibyl, Roman - Kelarová, Štěpánka - Václavik, Richard - Tomšej, Petr - Stupavská, Monika - Zábranský, Lukáš - Charvatova Campbell, Anna - Klapetek, Petr - Buršíková, Vilma
PY - 2020
TI - Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions
PB - TANGER Ltd
CY - Ostrava
SN - 9788087294956
KW - PECVD
KW - hexamethyldisiloxane
KW - oxygen
KW - mechanical properties
KW - AFM
KW - surface free energy
UR - https://doi.org/10.37904/nanocon.2019.8699
L2 - https://doi.org/10.37904/nanocon.2019.8699
N2 - In the present work plasma-polymer nanocomposite thin films were prepared under dusty plasma conditions in capacitively coupled RF discharges. The main focus was on the study of the formation of the organosilicon plasma polymers and their growth. The plasma polymers were grown heterogeneously in form of polymeric particles arising from the discharge volume which incorporated into the amorphous organosilicon polymeric film growing on the silicon and glass substrates. The created nanocomposite structure had very beneficial influence on the film properties. The films showed very interesting mechanical and surface properties. Variation in deposition conditions enabled us to vary the surface free energy of the films. The mechanical properties of the films were studied using nanoindentation technique and the surface structure was studied using atomic force microscopy. The atomic composition and chemical structure of the films were studied studied using XPS and FTIR techniques. The surface free energy of the films was studied using contact angle measuring techniques.
ER -
HOMOLA, Vojtěch, Roman PŘIBYL, Štěpánka KELAROVÁ, Richard VÁCLAVIK, Petr TOMŠEJ, Monika STUPAVSKÁ, Lukáš ZÁBRANSKÝ, Anna CHARVATOVA CAMPBELL, Petr KLAPETEK a Vilma BURŠÍKOVÁ. Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions. Online. In \textit{11th International Conference on Nanomaterials - Research \&{} Application (NANOCON 2019)}. Ostrava: TANGER Ltd, 2020, s.~642-647. ISBN~978-80-87294-95-6. Dostupné z: https://dx.doi.org/10.37904/nanocon.2019.8699.
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