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@article{1691637, author = {Krumpolec, Richard and Jurmanová, Jana and Zemánek, Miroslav and Kelar, Jakub and Kováčik, Dušan and Černák, Mirko}, article_location = {Basel}, article_number = {20}, doi = {http://dx.doi.org/10.3390/app10207356}, keywords = {hydrogen plasma; atmospheric pressure plasma; selective etching; polymer-metal mesh composite foil; roll-to-roll processing}, language = {eng}, issn = {2076-3417}, journal = {Applied Sciences}, title = {Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma}, url = {https://doi.org/10.3390/app10207356}, volume = {10}, year = {2020} }
TY - JOUR ID - 1691637 AU - Krumpolec, Richard - Jurmanová, Jana - Zemánek, Miroslav - Kelar, Jakub - Kováčik, Dušan - Černák, Mirko PY - 2020 TI - Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma JF - Applied Sciences VL - 10 IS - 20 SP - 1-11 EP - 1-11 PB - MDPI SN - 20763417 KW - hydrogen plasma KW - atmospheric pressure plasma KW - selective etching KW - polymer-metal mesh composite foil KW - roll-to-roll processing UR - https://doi.org/10.3390/app10207356 L2 - https://doi.org/10.3390/app10207356 N2 - We present a novel method of surface processing of complex polymer-metal composite substrates. Atmospheric-pressure plasma etching in pure H-2, N-2, H-2/N-2 and air plasmas was used to fabricate flexible transparent composite poly(methyl methacrylate) (PMMA)-based polymer film/Ag-coated Cu metal wire mesh substrates with conductive connection sites by the selective removal of the thin (similar to 10-100 nm) surface PMMA layer. To mimic large-area roll-to-roll processing, we used an advanced alumina-based concavely curved electrode generating a thin and high-power density cold plasma layer by the diffuse coplanar surface barrier discharge. A short 1 s exposure to pure hydrogen plasma, led to successful highly-selective etching of the surface PMMA film without any destruction of the Ag-coated Cu metal wires embedded in the PMMA polymer. On the other hand, the use of ambient air, pure nitrogen and H-2/N-2 plasmas resulted in undesired degradation both of the polymer and the metal wires surfaces. Since it was found that the etching efficiency strongly depends on the process parameters, such as treatment time and the distance from the electrode surface, we studied the effect and performance of these parameters. ER -
KRUMPOLEC, Richard, Jana JURMANOVÁ, Miroslav ZEMÁNEK, Jakub KELAR, Dušan KOVÁČIK a Mirko ČERNÁK. Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma. \textit{Applied Sciences}. Basel: MDPI, 2020, roč.~10, č.~20, s.~1-11. ISSN~2076-3417. Dostupné z: https://dx.doi.org/10.3390/app10207356.
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