Determining shape of thickness non-uniformity using
variable-angle spectroscopic ellipsometry

J 2020

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

VOHÁNKA, Jiří, Štěpán ŠUSTEK, Vilma BURŠÍKOVÁ, Veronika ŠKLÍBOVÁ, Václav ŠULC et. al.

Basic information

Original name

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Authors

VOHÁNKA, Jiří (203 Czech Republic, guarantor, belonging to the institution), Štěpán ŠUSTEK (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Veronika ŠKLÍBOVÁ (203 Czech Republic, belonging to the institution), Václav ŠULC (203 Czech Republic), Vojtěch HOMOLA (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), Martin ČERMÁK (203 Czech Republic, belonging to the institution), Miloslav OHLÍDAL (203 Czech Republic) and Ivan OHLÍDAL (203 Czech Republic, belonging to the institution)

Edition

Applied Surface Science, Elsevier Science, 2020, 0169-4332

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 6.707

RIV identification code

RIV/00216224:14310/20:00114444

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.apsusc.2020.147625

UT WoS

000582367700057

Keywords in English

Thickness non-uniformity; Ellipsometry; Imaging spectroscopic reflectometry

Abstract

V originále

The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.

Links

GA19-15240S, research and development project

Name: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Czech Science Foundation

90097, large research infrastructures

Name: CEPLANT

Citovat

VOHÁNKA, Jiří, Štěpán ŠUSTEK, Vilma BURŠÍKOVÁ, Veronika ŠKLÍBOVÁ, Václav ŠULC, Vojtěch HOMOLA, Daniel FRANTA, Martin ČERMÁK, Miloslav OHLÍDAL and Ivan OHLÍDAL. Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry. Applied Surface Science. Elsevier Science, 2020, vol. 534, December 2020, p. 1-10. ISSN 0169-4332. Available from: https://dx.doi.org/10.1016/j.apsusc.2020.147625.

@article{1692072,
   author = {Vohánka, Jiří and Šustek, Štěpán and Buršíková, Vilma and Šklíbová, Veronika and Šulc, Václav and Homola, Vojtěch and Franta, Daniel and Čermák, Martin and Ohlídal, Miloslav and Ohlídal, Ivan},
   article_number = {December 2020},
   doi = {http://dx.doi.org/10.1016/j.apsusc.2020.147625},
   keywords = {Thickness non-uniformity; Ellipsometry; Imaging spectroscopic reflectometry},
   language = {eng},
   issn = {0169-4332},
   journal = {Applied Surface Science},
   title = {Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry},
   url = {https://doi.org/10.1016/j.apsusc.2020.147625},
   volume = {534},
   year = {2020}
}

TY  - JOUR
ID  - 1692072
AU  - Vohánka, Jiří - Šustek, Štěpán - Buršíková, Vilma - Šklíbová, Veronika - Šulc, Václav - Homola, Vojtěch - Franta, Daniel - Čermák, Martin - Ohlídal, Miloslav - Ohlídal, Ivan
PY  - 2020
TI  - Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry
JF  - Applied Surface Science
VL  - 534
IS  - December 2020
SP  - 1-10
EP  - 1-10
PB  - Elsevier Science
SN  - 01694332
KW  - Thickness non-uniformity
KW  - Ellipsometry
KW  - Imaging spectroscopic reflectometry
UR  - https://doi.org/10.1016/j.apsusc.2020.147625
L2  - https://doi.org/10.1016/j.apsusc.2020.147625
N2  - The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.
ER  -

VOHÁNKA, Jiří, Štěpán ŠUSTEK, Vilma BURŠÍKOVÁ, Veronika ŠKLÍBOVÁ, Václav ŠULC, Vojtěch HOMOLA, Daniel FRANTA, Martin ČERMÁK, Miloslav OHLÍDAL and Ivan OHLÍDAL. Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry. \textit{Applied Surface Science}. Elsevier Science, 2020, vol.~534, December 2020, p.~1-10. ISSN~0169-4332. Available from: https://dx.doi.org/10.1016/j.apsusc.2020.147625.

Detailed Information on Publication Record