Diagnostics of reactive magnetron sputtering
| VAŠINA, Petr, Pavel DVOŘÁK, Tereza SCHMIDTOVÁ, Vilma BURŠÍKOVÁ and Radek ŽEMLIČKA. Diagnostics of reactive magnetron sputtering. 2010. |
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| Basic information | |
|---|---|
| Original name | Diagnostics of reactive magnetron sputtering |
| Name in Czech | Diagnostika reaktivního magnetronového naprašování |
| Authors | VAŠINA, Petr (203 Czech Republic, belonging to the institution), Pavel DVOŘÁK (203 Czech Republic, guarantor, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Radek ŽEMLIČKA (203 Czech Republic, belonging to the institution). |
| Edition | 2010. |
| Other information | |
|---|---|
| Original language | English |
| Type of outcome | Requested lectures |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Ireland |
| Confidentiality degree | is not subject to a state or trade secret |
| Organization unit | Faculty of Science |
| Keywords (in Czech) | vyšší harmonické frekvence;plazma;magnetron;diamantu podobné vrstvy |
| Keywords in English | higher harmonic frequencies;plasma;magnetron;DLC |
| Tags | International impact, Reviewed |
| Changed by | Changed by: doc. Mgr. Pavel Dvořák, Ph.D., učo 16711. Changed: 15/12/2020 17:38. |
| Abstract |
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| Monitoring of reactive magnetron sputtering and thin film deposition/etching by means of higher harmonic frequencies. |
| Abstract (in Czech) |
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| Sledování reaktivního magnetronového naprošování a depozice/leptání tenkých diamantu podobných vrstev pomocí měření vyšších harmonických frekvencí. |
| Links | |
|---|---|
| GA202/07/1669, research and development project | Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích |
| Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges | |
| GP202/08/P038, research and development project | Name: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev |
| Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition | |
| MSM0021622402, plan (intention) | Name: Časná diagnostika a léčba kardiovaskulárních chorob |
| Investor: Ministry of Education, Youth and Sports of the CR, Early diagnostics and treatment of cardiovascular diseases | |
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