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@inproceedings{1730440, author = {Kubečka, Martin and Toman, Jozef and Šnírer, Miroslav and Jašek, Ondřej and Kudrle, Vít and Jurmanová, Jana}, address = {Ostrava}, booktitle = {NANOCON Conference Proceedings - International Conference on Nanomaterials}, doi = {http://dx.doi.org/10.37904/nanocon.2019.8455}, edition = {1}, keywords = {Graphene; microwave plasma; temperature; dielectric substrate}, howpublished = {elektronická verze "online"}, language = {eng}, location = {Ostrava}, isbn = {978-80-87294-95-6}, pages = {80-84}, publisher = {TANGER Ltd.}, title = {The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment}, url = {https://www.confer.cz/nanocon/2019}, year = {2020} }
TY - JOUR ID - 1730440 AU - Kubečka, Martin - Toman, Jozef - Šnírer, Miroslav - Jašek, Ondřej - Kudrle, Vít - Jurmanová, Jana PY - 2020 TI - The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment PB - TANGER Ltd. CY - Ostrava SN - 9788087294956 KW - Graphene KW - microwave plasma KW - temperature KW - dielectric substrate UR - https://www.confer.cz/nanocon/2019 N2 - The relation between plasma temperature and properties of graphene nanosheet layer deposited on Si/SiO2 substrate by decomposition of ethanol in microwave plasma torch discharge at atmospheric pressure was investigated in dependence on delivered microwave power and gas flow rates. Plasma modelling was carried out using COMSOL Multiphysics software with delivered microwave power, gas flow rates and experimental reactor geometry as input parameters. Results of the heat flow and fluid dynamics modelling were compared with substrate temperature measured by thermocouple integrated in quartz tube substrate holder. The graphene nanosheets layer was characterized by SEM, Raman spectroscopy and 4-point probe method. The layers were severals tens of micrometre thick and their sheet resistance varied from 2 to 40 kiloohm/sq. The properties of individual graphene nanosheets, 2D/G and D/G Raman band ratio, as well as the sheet resistance of their conductive network were correlated with the increase of plasma temperature with increasing microwave power. The substrate temperature increased linearly with delivered microwave power and the layer sheet resistance was decreasing with increasing microwave power and saturated at 2 kiloohm/sq and D/G ratio of 0.6. ER -
KUBEČKA, Martin, Jozef TOMAN, Miroslav ŠNÍRER, Ondřej JAŠEK, Vít KUDRLE and Jana JURMANOVÁ. The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment. Online. In \textit{NANOCON Conference Proceedings - International Conference on Nanomaterials}. 1st ed. Ostrava: TANGER Ltd., 2020, p.~80-84. ISBN~978-80-87294-95-6. Available from: https://dx.doi.org/10.37904/nanocon.2019.8455.
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