ONDRAČKA, Pavel, David NEČAS, Michele CARETTE, Stephane ELISABETH, David HOLEC, Agnes GRANIER, Antoine GOULLET, Lenka ZAJÍČKOVÁ and Mireille RICHARD-PLOUET. Unravelling local environments in mixed TiO2-SiO2 thin films by XPS and ab initio calculations. Applied Surface Science. Amsterdam: Elsevier, 2020, vol. 510, April 2020, p. 1-11. ISSN 0169-4332. Available from: https://dx.doi.org/10.1016/j.apsusc.2019.145056.
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Basic information
Original name Unravelling local environments in mixed TiO2-SiO2 thin films by XPS and ab initio calculations
Authors ONDRAČKA, Pavel (203 Czech Republic, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution), Michele CARETTE, Stephane ELISABETH, David HOLEC, Agnes GRANIER, Antoine GOULLET, Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor, belonging to the institution) and Mireille RICHARD-PLOUET.
Edition Applied Surface Science, Amsterdam, Elsevier, 2020, 0169-4332.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10403 Physical chemistry
Country of publisher Netherlands
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 6.707
RIV identification code RIV/00216224:14310/20:00117924
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1016/j.apsusc.2019.145056
UT WoS 000514902000004
Keywords in English TixSi1-xO2; X-ray photoelectron spectroscopy (XPS); Phase separation; Density functional theory (DFT)
Tags rivok
Tags International impact, Reviewed
Changed by Changed by: Mgr. Marie Šípková, DiS., učo 437722. Changed: 6/3/2024 14:53.
Abstract
Mixed TixSi1-xO2 oxide can exhibit a partial phase separation of the TiO2 and SiO2 phases at the atomic level. The quantification of TiO2-SiO2 mixing in the amorphous material is complicated and was so far done mostly by infrared spectroscopy. We developed a new approach to the fitting of X-ray photoelectron spectroscopy data for the quantification of partial phase separation in amorphous TixSi1-xO2 thin films deposited by plasma enhanced chemical vapour deposition. Several fitting constraints reducing the total number of degrees of freedom in the fits and thus the fit uncertainty were obtained by using core electron binding energies predicted by density functional theory calculations on TixSi1-xO2 amorphous supercells. Consequently, a decomposition of the O is peak into TiO2, SiO2 and mixed components was possible. The component areas ratios were compared with the ratios predicted by older theoretical models based on the atomic environment statistics and we also developed several new models corresponding to more realistic atomic structure and partial mixing. Based on the comparison we conclude that the studied films are mostly disordered, with only a moderate phase separation.
Links
LQ1601, research and development projectName: CEITEC 2020 (Acronym: CEITEC2020)
Investor: Ministry of Education, Youth and Sports of the CR
7AMB15AT017, research and development projectName: Studium struktury elektronických a optických vlastností tuhých roztoků oxidů s využitím ab initio výpočtů
Investor: Ministry of Education, Youth and Sports of the CR
7AMB15FR036, research and development projectName: Výzkum dielektrických vrstev TixSiyOz připravených plazmochemickou metodou (PECVD) pro optické a elektronické aplikace
Investor: Ministry of Education, Youth and Sports of the CR
90070, large research infrastructuresName: IT4Innovations
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