Beam shaping and probe characterization in the scanning
electron microscope

J 2021

Beam shaping and probe characterization in the scanning electron microscope

ŘIHÁČEK, Tomáš; Michal HORÁK; Thomas SCHACHINGER; Filip MIKA; Milan MATĚJKA et. al.

Základní údaje

Originální název

Beam shaping and probe characterization in the scanning electron microscope

Autoři

Vydání

Ultramicroscopy, Amsterdam, North Holland, 2021, 0304-3991

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Utajení

není předmětem státního či obchodního tajemství

Impakt faktor

Impact factor: 2.994

DOI

http://dx.doi.org/10.1016/j.ultramic.2021.113268

UT WoS

000649633800002

EID Scopus

2-s2.0-85104406836

Klíčová slova anglicky

Electron diffraction; SEM; Electron beam structuring; Spot shape measurement; Electron vortex beam

Štítky

RIV ne

Změněno: 8. 6. 2021 08:49, Mgr. Bc. Tomáš Řiháček, Ph.D.

Anotace

V originále

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

Citovat

ŘIHÁČEK, Tomáš; Michal HORÁK; Thomas SCHACHINGER; Filip MIKA; Milan MATĚJKA; Stanislav KRÁTKÝ; Tomáš FOŘT; Tomáš RADLIČKA; Cameron W. JOHNSON; Libor NOVÁK; SEĎA; Benjamin J. MCMORRAN a Ilona MÜLLEROVÁ. Beam shaping and probe characterization in the scanning electron microscope. Ultramicroscopy. Amsterdam: North Holland, 2021, roč. 225, 9 s. ISSN 0304-3991. Dostupné z: https://dx.doi.org/10.1016/j.ultramic.2021.113268.

@article{1771338,
   author = {Řiháček, Tomáš and Horák, Michal and Schachinger, Thomas and Mika, Filip and Matějka, Milan and Krátký, Stanislav and Fořt, Tomáš and Radlička, Tomáš and Johnson, Cameron W. and Novák, Libor and Seďa, and McMorran, Benjamin J. and Müllerová, Ilona},
   article_location = {Amsterdam},
   doi = {http://dx.doi.org/10.1016/j.ultramic.2021.113268},
   keywords = {Electron diffraction; SEM; Electron beam structuring; Spot shape measurement; Electron vortex beam},
   language = {eng},
   issn = {0304-3991},
   journal = {Ultramicroscopy},
   title = {Beam shaping and probe characterization in the scanning electron microscope},
   volume = {225},
   year = {2021}
}

TY  - JOUR
ID  - 1771338
AU  - Řiháček, Tomáš - Horák, Michal - Schachinger, Thomas - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, Cameron W. - Novák, Libor - Seďa,
AU  - McMorran, Benjamin J. - Müllerová, Ilona
PY  - 2021
TI  - Beam shaping and probe characterization in the scanning electron microscope
JF  - Ultramicroscopy
VL  - 225
PB  - North Holland
SN  - 03043991
KW  - Electron diffraction
KW  - SEM
KW  - Electron beam structuring
KW  - Spot shape measurement
KW  - Electron vortex beam
N2  - Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
ER  -

ŘIHÁČEK, Tomáš; Michal HORÁK; Thomas SCHACHINGER; Filip MIKA; Milan MATĚJKA; Stanislav KRÁTKÝ; Tomáš FOŘT; Tomáš RADLIČKA; Cameron W. JOHNSON; Libor NOVÁK; SEĎA; Benjamin J. MCMORRAN a Ilona MÜLLEROVÁ. Beam shaping and probe characterization in the scanning electron microscope. \textit{Ultramicroscopy}. Amsterdam: North Holland, 2021, roč.~225, 9 s. ISSN~0304-3991. Dostupné z: https://dx.doi.org/10.1016/j.ultramic.2021.113268.

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