| ŘIHÁČEK, Tomáš, Michal HORÁK, Thomas SCHACHINGER, Filip MIKA, Milan MATĚJKA, Stanislav KRÁTKÝ, Tomáš FOŘT, Tomáš RADLIČKA, Cameron W. JOHNSON, Libor NOVÁK, SEĎA, Benjamin J. MCMORRAN and Ilona MÜLLEROVÁ. Beam shaping and probe characterization in the scanning electron microscope. Ultramicroscopy. Amsterdam: North Holland, 2021, vol. 225, 9 pp. ISSN 0304-3991. Available from: https://dx.doi.org/10.1016/j.ultramic.2021.113268. |
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@article{1771338,
author = {Řiháček, Tomáš and Horák, Michal and Schachinger, Thomas and Mika, Filip and Matějka, Milan and Krátký, Stanislav and Fořt, Tomáš and Radlička, Tomáš and Johnson, Cameron W. and Novák, Libor and Seďa, and McMorran, Benjamin J. and Müllerová, Ilona},
article_location = {Amsterdam},
doi = {http://dx.doi.org/10.1016/j.ultramic.2021.113268},
keywords = {Electron diffraction; SEM; Electron beam structuring; Spot shape measurement; Electron vortex beam},
language = {eng},
issn = {0304-3991},
journal = {Ultramicroscopy},
title = {Beam shaping and probe characterization in the scanning electron microscope},
volume = {225},
year = {2021}
}
TY - JOUR
ID - 1771338
AU - Řiháček, Tomáš - Horák, Michal - Schachinger, Thomas - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, Cameron W. - Novák, Libor - Seďa,
AU - McMorran, Benjamin J. - Müllerová, Ilona
PY - 2021
TI - Beam shaping and probe characterization in the scanning electron microscope
JF - Ultramicroscopy
VL - 225
PB - North Holland
SN - 03043991
KW - Electron diffraction
KW - SEM
KW - Electron beam structuring
KW - Spot shape measurement
KW - Electron vortex beam
N2 - Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
ER -
ŘIHÁČEK, Tomáš, Michal HORÁK, Thomas SCHACHINGER, Filip MIKA, Milan MATĚJKA, Stanislav KRÁTKÝ, Tomáš FOŘT, Tomáš RADLIČKA, Cameron W. JOHNSON, Libor NOVÁK, SEĎA, Benjamin J. MCMORRAN and Ilona MÜLLEROVÁ. Beam shaping and probe characterization in the scanning electron microscope. \textit{Ultramicroscopy}. Amsterdam: North Holland, 2021, vol.~225, 9 pp. ISSN~0304-3991. Available from: https://dx.doi.org/10.1016/j.ultramic.2021.113268.
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