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@article{1793440,
author = {Mandal, Govinda and Gorylová, Magdaléna and Nazabal, Virginie and Němec, Petr and Havel, Josef},
article_number = {12},
doi = {http://dx.doi.org/10.1111/jace.18021},
keywords = {amorphous chalcogenides; clusters; diminishing clusters fragmentation; Ga-Sb- Te; laser ablation; quadrupole ion trap time-of- flight mass spectrometry; thin films},
language = {eng},
issn = {0002-7820},
journal = {Journal of the American Ceramic Society},
title = {Laser ablation of Ga-Sb- Te thin films monitored with quadrupole ion trap time-of- flight mass spectrometry},
url = {https://doi.org/10.1111/jace.18021},
volume = {104},
year = {2021}
}
TY - JOUR
ID - 1793440
AU - Mandal, Govinda - Gorylová, Magdaléna - Nazabal, Virginie - Němec, Petr - Havel, Josef
PY - 2021
TI - Laser ablation of Ga-Sb- Te thin films monitored with quadrupole ion trap time-of- flight mass spectrometry
JF - Journal of the American Ceramic Society
VL - 104
IS - 12
SP - 6643-6652
EP - 6643-6652
PB - Wiley
SN - 00027820
KW - amorphous chalcogenides
KW - clusters
KW - diminishing clusters fragmentation
KW - Ga-Sb- Te
KW - laser ablation
KW - quadrupole ion trap time-of- flight mass spectrometry
KW - thin films
UR - https://doi.org/10.1111/jace.18021
N2 - Laser ablation of Ga-Sb-Te chalcogenide thin films prepared by radiofrequency magnetron co-sputtering was monitored with quadrupole ion trap time-of-flight mass spectrometry (QIT-TOF-MS). The mass spectra of 11 thin films of various compositions (Ga: 0–53.1,Sb: 0–52.0,and Te: 0–100.0 at. %) were recorded. Several series of unary (Gax, Sby, and Tez) binary (GaxSby, GaxTez, and SbyTez), and ternary GaxSbyTez clusters were identified in both positive and negative ion modes. Stoichiometry of observed clusters was determined. Up to 18 binary clusters (positively and negatively charged) were detected for thin film with low Sb content of 6.5 at. %. The highest number (4) of ternary clusters was observed for thin film with high Te content of 66.7 at. %. The number of generated clusters and their peaks intensity varied according to the chemical composition of thin films. Altogether, 41 clusters were detected. The laser ablation monitoring shows laser-induced fragmentation of thin film structure. The relation of clusters stoichiometries to the chemical composition of thin films is discussed. The fragmentation can be diminished by covering a surface of thin films with paraffin's, glycerol, or trehalose sugar thin layers. The stoichiometry of generated clusters shows partial structural characterization of thin films.
ER -
MANDAL, Govinda, Magdaléna GORYLOVÁ, Virginie NAZABAL, Petr NĚMEC and Josef HAVEL. Laser ablation of Ga-Sb- Te thin films monitored with quadrupole ion trap time-of- flight mass spectrometry. \textit{Journal of the American Ceramic Society}. Wiley, 2021, vol.~104, No~12, p.~6643-6652. ISSN~0002-7820. Available from: https://dx.doi.org/10.1111/jace.18021.
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