Detailed Information on Publication Record
2021
Higher harmonic frequencies in a capacitively coupled plasma
DVOŘÁK, Pavel, Radek ŽEMLIČKA, Roman PŘIBYL, Maroš TKÁČIK, Juraj PÁLENIK et. al.Basic information
Original name
Higher harmonic frequencies in a capacitively coupled plasma
Name in Czech
Vyšší harmonické frekvence v kapacitně vázaném plazmatu
Authors
DVOŘÁK, Pavel (203 Czech Republic, guarantor, belonging to the institution), Radek ŽEMLIČKA (203 Czech Republic), Roman PŘIBYL (203 Czech Republic, belonging to the institution), Maroš TKÁČIK (703 Slovakia), Juraj PÁLENIK (703 Slovakia), Petr VAŠINA (203 Czech Republic, belonging to the institution), Petr SKOPAL (203 Czech Republic, belonging to the institution), Zdeněk NAVRÁTIL (203 Czech Republic, belonging to the institution) and Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution)
Edition
8th Plasma Science & Entrepreneurship Workshop, 2021
Other information
Language
English
Type of outcome
Vyžádané přednášky
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/21:00119328
Organization unit
Faculty of Science
Keywords (in Czech)
vyšší harmonické frekvence;plazma;kapacitně vázané výboje
Keywords in English
higher harmonic frequencies;plasma;capacitively coupled discharges
Tags
International impact
Změněno: 28/1/2022 13:45, doc. Mgr. Pavel Dvořák, Ph.D.
V originále
Nonlinear nature of sheaths leads to nonlinear VA characteristics and generation of higher harmonic frequencies in capacitively coupled discharges. Higher harmonic frequencies are known to influence heating of electrons, especially at low pressure, and to be very sensitive to number of discharge parameters, which enables to use higher harmonics for monitoring of various deposition and etching processes. The presentation summarizes the topic of probe measurements of higher harmonic frequencies of plasma potential, nonlinear modeling of behaviour of higher harmonic frequencies in capacitive discharges and explanation of the mechanism which leads to the sensitive reaction of higher harmonics on the presence of a deposited or etched thin film.
In Czech
Shrnutí výsledků získaných pří výzkumu vyšších harmonických frekvencí spontánně generovaných v kapacitně vázaných výbojích.
Links
| GA19-15240S, research and development project |
| ||
| LM2018097, research and development project |
|