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@proceedings{1819238, author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay}, booktitle = {International Conference on Metallurgical Coatings and Thin Films 2021}, keywords = {magnetron sputtering; LIF; AAS; plasma diagnostics}, language = {eng}, title = {Dynamics of the titanium ground state atoms and ions in HiPIMS discharge}, year = {2021} }
TY - CONF ID - 1819238 AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay PY - 2021 TI - Dynamics of the titanium ground state atoms and ions in HiPIMS discharge KW - magnetron sputtering KW - LIF KW - AAS KW - plasma diagnostics N2 - This contribution reports on plasma diagnostics of HiPIMS discharge by laser-induced fluorescence and atomic absorption spectroscopy. As a result of discharge characterization, the number densities, as well as temporal propagation of the neutral and ionized sputtered titanium atoms were determined. The results obtained in this study can be utilized to control the ionization degree, sputtering rate, as well as the other discharge parameters in industrial deposition processes involving HiPIMS discharges. ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of the titanium ground state atoms and ions in HiPIMS discharge. In \textit{International Conference on Metallurgical Coatings and Thin Films 2021}. 2021.
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